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- W2023748087 abstract "This paper addresses the use of RF MEMS devices in wireless and satellite communication systems. It describes the MEMS actuators typically needed for such devices. Novel configurations are presented for MEMS variable capacitors, MEMS tunable inductors and RF MEMS mutiport switches. The tuning range of the variable capacitor was measured and found to be 280%, which far exceeds that of the traditional parallel plate MEMS variable capacitors. The MEMS tunable inductor is realized using MEMS fixed inductors, capacitors and a variable MEMS capacitor. The proposed MEMS multiport switch has demonstrated a superior RF performance up to 20 GHz." @default.
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- W2023748087 date "2004-02-16" @default.
- W2023748087 modified "2023-09-23" @default.
- W2023748087 title "RF MEMS devices for communication systems" @default.
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- W2023748087 doi "https://doi.org/10.1117/12.585325" @default.
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