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- W2023759091 abstract "Abstract Mass spectrometry of the plasma effluent during Reactive Ion Beam Etching (RIBE) of GaAs using an Inductively Coupled Plasma (ICP) source and a Cl 2 /Ar gas chemistry shows that AsCl 3 , AsCl 2 and AsCl are all detected as etch products for As, while GaCl 2 is the main signal detected for the Ga products. The variation in selective ion currents for the various etch products has been examined as a function of chuck temperature (30–100°C), percentage Cl 2 in the gas flow, beam current (60–180 mA) and beam voltage (200–800 V). The results are consistent with AsCl 3 and GaCl 3 being the main etch product species under our conditions, with fragmentation being responsible for the observed mass spectra." @default.
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- W2023759091 date "1997-01-01" @default.
- W2023759091 modified "2023-09-24" @default.
- W2023759091 title "In-Situ Monitoring Of Etch By-Products During Reactive Ion Beam Etching Of Gaas In Chlorine/Argon" @default.
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- W2023759091 doi "https://doi.org/10.1557/proc-483-191" @default.
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