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- W2023779601 abstract "Boron nitride films prepared by reactive ion plating from a boron evaporation source were characterized structurally using three independent electron optical techniques: energy filtered electron diffraction with radial distribution function analysis; electron energy-loss spectroscopy of the near-edge structure of the boron K edge; and spectroscopy of the plasmon region of the energy-loss spectrum. Both specimens had a graded BNx layer between the BN layer and the silicon substrate and in addition one specimen had a titanium bonding layer underneath the BNx layer. The presence of c-BN in both specimens was confirmed by all techniques. The specimen with the titanium bonding layer was examined in cross section and showed essentially pure c-BN on the surface. A model for the formation of c-BN assisted by the compressive stress generated during deposition is proposed." @default.
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- W2023779601 date "1991-09-15" @default.
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- W2023779601 title "Electron optical characterization of cubic boron nitride thin films prepared by reactive ion plating" @default.
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- W2023779601 doi "https://doi.org/10.1063/1.349330" @default.
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