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- W2023808022 abstract "In this study,MFIS (Metal/Ferroelectric/Insulator/Semiconductor) capacitors whose structure is Al/BFO+Nb/HfO 2 /p-Si are investigatedby using Taguchi Method. The effects of leakage current, memory window, and signal-to-noise ratio (S/N ratio) are discussed by different process conditions. As a result, the leakage current and memory window indicate the better performance on th same process condition. The better conditions of this MFIS capacitoroccur in rapid thermal annealing (RTA) at 700°C, 5W direct current (DC) power of Nb sputtering and 15 of argon-to-oxygen ratio for laekage current and memory window.Oxygen vacancies were reduced bydoping niobium (Nb) that Nb ions replace ferrum (Fe) ions with RTA at 700°C. The more Nb dopesthe more Nb ions replace Fe ions. Butthe excessive Nb induces to increase the leakage current and reduce the memory widow." @default.
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- W2023808022 date "2013-12-01" @default.
- W2023808022 modified "2023-09-27" @default.
- W2023808022 title "Optimization of BiFeO<sub>3</sub>MFIS Capacitors Doped Niobium by Using Taguchi Method" @default.
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- W2023808022 doi "https://doi.org/10.4028/www.scientific.net/amm.481.141" @default.
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