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- W2023809375 abstract "For the manufacturing of submicron or deep submicron ULSIs, it is important to completely suppress particles and contamination created on the silicon wafer surface. The time and logistics associated with particle testing on product have driven manufacturing to find fast and effective monitoring techniques that can deliver high manufacturing efficiency at lower cost. Using particle monitoring is an accurate and cost effective method of contamination control in a production environment. In general, the traditional method is using 2 pieces control wafers (top and bottom) in slot position to monitor production environment. In this work, an improvement method was proposed to implement using 6-pieces control wafers replacing the traditional method (2 pieces). The experimental results shown that the improvement method has 7 times sensitive efficiencies than the traditional one." @default.
- W2023809375 created "2016-06-24" @default.
- W2023809375 creator A5009731603 @default.
- W2023809375 creator A5038398128 @default.
- W2023809375 creator A5046308119 @default.
- W2023809375 creator A5084475101 @default.
- W2023809375 creator A5091210075 @default.
- W2023809375 date "2007-01-01" @default.
- W2023809375 modified "2023-10-16" @default.
- W2023809375 title "Implement of an Improvement Particle Monitoring Methodology in an Industry Production Process" @default.
- W2023809375 cites W1993043859 @default.
- W2023809375 cites W2016185764 @default.
- W2023809375 cites W2064225588 @default.
- W2023809375 cites W2081365649 @default.
- W2023809375 cites W2093798086 @default.
- W2023809375 cites W2146917473 @default.
- W2023809375 cites W2172265395 @default.
- W2023809375 doi "https://doi.org/10.1109/edssc.2007.4450184" @default.
- W2023809375 hasPublicationYear "2007" @default.
- W2023809375 type Work @default.
- W2023809375 sameAs 2023809375 @default.
- W2023809375 citedByCount "0" @default.
- W2023809375 crossrefType "proceedings-article" @default.
- W2023809375 hasAuthorship W2023809375A5009731603 @default.
- W2023809375 hasAuthorship W2023809375A5038398128 @default.
- W2023809375 hasAuthorship W2023809375A5046308119 @default.
- W2023809375 hasAuthorship W2023809375A5084475101 @default.
- W2023809375 hasAuthorship W2023809375A5091210075 @default.
- W2023809375 hasConcept C10138342 @default.
- W2023809375 hasConcept C111368507 @default.
- W2023809375 hasConcept C111919701 @default.
- W2023809375 hasConcept C112570922 @default.
- W2023809375 hasConcept C117671659 @default.
- W2023809375 hasConcept C127313418 @default.
- W2023809375 hasConcept C127413603 @default.
- W2023809375 hasConcept C139719470 @default.
- W2023809375 hasConcept C155386361 @default.
- W2023809375 hasConcept C160671074 @default.
- W2023809375 hasConcept C162324750 @default.
- W2023809375 hasConcept C171250308 @default.
- W2023809375 hasConcept C18903297 @default.
- W2023809375 hasConcept C192562407 @default.
- W2023809375 hasConcept C198082294 @default.
- W2023809375 hasConcept C200601418 @default.
- W2023809375 hasConcept C21880701 @default.
- W2023809375 hasConcept C2524010 @default.
- W2023809375 hasConcept C2778348673 @default.
- W2023809375 hasConcept C2778517922 @default.
- W2023809375 hasConcept C33923547 @default.
- W2023809375 hasConcept C35750839 @default.
- W2023809375 hasConcept C41008148 @default.
- W2023809375 hasConcept C86803240 @default.
- W2023809375 hasConcept C90673727 @default.
- W2023809375 hasConcept C93497512 @default.
- W2023809375 hasConcept C98045186 @default.
- W2023809375 hasConceptScore W2023809375C10138342 @default.
- W2023809375 hasConceptScore W2023809375C111368507 @default.
- W2023809375 hasConceptScore W2023809375C111919701 @default.
- W2023809375 hasConceptScore W2023809375C112570922 @default.
- W2023809375 hasConceptScore W2023809375C117671659 @default.
- W2023809375 hasConceptScore W2023809375C127313418 @default.
- W2023809375 hasConceptScore W2023809375C127413603 @default.
- W2023809375 hasConceptScore W2023809375C139719470 @default.
- W2023809375 hasConceptScore W2023809375C155386361 @default.
- W2023809375 hasConceptScore W2023809375C160671074 @default.
- W2023809375 hasConceptScore W2023809375C162324750 @default.
- W2023809375 hasConceptScore W2023809375C171250308 @default.
- W2023809375 hasConceptScore W2023809375C18903297 @default.
- W2023809375 hasConceptScore W2023809375C192562407 @default.
- W2023809375 hasConceptScore W2023809375C198082294 @default.
- W2023809375 hasConceptScore W2023809375C200601418 @default.
- W2023809375 hasConceptScore W2023809375C21880701 @default.
- W2023809375 hasConceptScore W2023809375C2524010 @default.
- W2023809375 hasConceptScore W2023809375C2778348673 @default.
- W2023809375 hasConceptScore W2023809375C2778517922 @default.
- W2023809375 hasConceptScore W2023809375C33923547 @default.
- W2023809375 hasConceptScore W2023809375C35750839 @default.
- W2023809375 hasConceptScore W2023809375C41008148 @default.
- W2023809375 hasConceptScore W2023809375C86803240 @default.
- W2023809375 hasConceptScore W2023809375C90673727 @default.
- W2023809375 hasConceptScore W2023809375C93497512 @default.
- W2023809375 hasConceptScore W2023809375C98045186 @default.
- W2023809375 hasLocation W20238093751 @default.
- W2023809375 hasOpenAccess W2023809375 @default.
- W2023809375 hasPrimaryLocation W20238093751 @default.
- W2023809375 hasRelatedWork W1578571657 @default.
- W2023809375 hasRelatedWork W1772653303 @default.
- W2023809375 hasRelatedWork W1821341076 @default.
- W2023809375 hasRelatedWork W1983621193 @default.
- W2023809375 hasRelatedWork W2023809375 @default.
- W2023809375 hasRelatedWork W2060853156 @default.
- W2023809375 hasRelatedWork W2109749727 @default.
- W2023809375 hasRelatedWork W2147229891 @default.
- W2023809375 hasRelatedWork W3128019161 @default.
- W2023809375 hasRelatedWork W2241250780 @default.
- W2023809375 isParatext "false" @default.
- W2023809375 isRetracted "false" @default.
- W2023809375 magId "2023809375" @default.
- W2023809375 workType "article" @default.