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- W2023863434 abstract "We proposed a tail function parameter extraction procedure for the establishment of a robust ion implantation database. We showed that, for the expression of ion implantation profiles, there are many local minimum values set for the third and fourth moment parameters of r and β for the Pearson function that comprises the standard dual Pearson and tail functions. We proposed the use of a joined tail function as a mediate function to extract r and β, and demonstrated that this enables us to extract the parameters uniquely. Other parameters associated with channeling phenomena can also be simply and uniquely extracted by our procedure." @default.
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- W2023863434 date "2010-12-31" @default.
- W2023863434 modified "2023-10-14" @default.
- W2023863434 title "Parameter Extraction Procedure for Ion Implantation Profiles to Establish Robust Database based on Tail Function" @default.
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- W2023863434 doi "https://doi.org/10.5573/jsts.2010.10.4.251" @default.
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