Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023871115> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2023871115 endingPage "703" @default.
- W2023871115 startingPage "697" @default.
- W2023871115 abstract "An extensive investigation on the diffusion and precipitation of Sb implanted in Si has been carried out. The rapid epitaxial regrowth of the amorphous layer produced by the incident ions brings Sb atoms into a substitutional position up to a concentration threshold of about 3.5 × 1020 cm−3. This high supersaturation (the solubility of Sb in Si is about 2 × 1019 cm−3 at 1000 °C) and the low value of the surface free energy facilitate the nucleation of precipitates, which form and grow in concomitance with the diffusion during the annealing. The kinetics of the precipitation has been investigated at 800, 900, and 1000 °C with isothermal treatments ranging between 3 min and 341 h. The experimental data have been compared with the results of a simulation program that takes into account the precipitation phenomena. Good agreement has been obtained for all the investigated experimental conditions both for total and carrier distributions. The model represents a significant improvement of the simulation of Sb diffusion in silicon; in fact, the more commonly used process codes are inadequate to correctly foresee the dopant distribution in supersaturated conditions." @default.
- W2023871115 created "2016-06-24" @default.
- W2023871115 creator A5031560456 @default.
- W2023871115 creator A5056342902 @default.
- W2023871115 creator A5087554113 @default.
- W2023871115 date "1992-01-15" @default.
- W2023871115 modified "2023-09-25" @default.
- W2023871115 title "Experimental investigation and simulation of Sb diffusion in Si" @default.
- W2023871115 cites W1965464118 @default.
- W2023871115 cites W1990844860 @default.
- W2023871115 cites W2012557762 @default.
- W2023871115 cites W2013730897 @default.
- W2023871115 cites W2032084314 @default.
- W2023871115 cites W2042372182 @default.
- W2023871115 cites W2045240462 @default.
- W2023871115 cites W2072411012 @default.
- W2023871115 cites W2160637658 @default.
- W2023871115 cites W2166215509 @default.
- W2023871115 doi "https://doi.org/10.1063/1.351329" @default.
- W2023871115 hasPublicationYear "1992" @default.
- W2023871115 type Work @default.
- W2023871115 sameAs 2023871115 @default.
- W2023871115 citedByCount "29" @default.
- W2023871115 countsByYear W20238711152013 @default.
- W2023871115 countsByYear W20238711152015 @default.
- W2023871115 crossrefType "journal-article" @default.
- W2023871115 hasAuthorship W2023871115A5031560456 @default.
- W2023871115 hasAuthorship W2023871115A5056342902 @default.
- W2023871115 hasAuthorship W2023871115A5087554113 @default.
- W2023871115 hasConcept C107054158 @default.
- W2023871115 hasConcept C110738630 @default.
- W2023871115 hasConcept C113196181 @default.
- W2023871115 hasConcept C121332964 @default.
- W2023871115 hasConcept C133347239 @default.
- W2023871115 hasConcept C145148216 @default.
- W2023871115 hasConcept C153294291 @default.
- W2023871115 hasConcept C171250308 @default.
- W2023871115 hasConcept C178790620 @default.
- W2023871115 hasConcept C185592680 @default.
- W2023871115 hasConcept C191897082 @default.
- W2023871115 hasConcept C191952053 @default.
- W2023871115 hasConcept C192562407 @default.
- W2023871115 hasConcept C200447597 @default.
- W2023871115 hasConcept C2777855556 @default.
- W2023871115 hasConcept C2779227376 @default.
- W2023871115 hasConcept C43617362 @default.
- W2023871115 hasConcept C49040817 @default.
- W2023871115 hasConcept C544956773 @default.
- W2023871115 hasConcept C56052488 @default.
- W2023871115 hasConcept C57863236 @default.
- W2023871115 hasConcept C61048295 @default.
- W2023871115 hasConcept C69357855 @default.
- W2023871115 hasConcept C8010536 @default.
- W2023871115 hasConcept C97355855 @default.
- W2023871115 hasConceptScore W2023871115C107054158 @default.
- W2023871115 hasConceptScore W2023871115C110738630 @default.
- W2023871115 hasConceptScore W2023871115C113196181 @default.
- W2023871115 hasConceptScore W2023871115C121332964 @default.
- W2023871115 hasConceptScore W2023871115C133347239 @default.
- W2023871115 hasConceptScore W2023871115C145148216 @default.
- W2023871115 hasConceptScore W2023871115C153294291 @default.
- W2023871115 hasConceptScore W2023871115C171250308 @default.
- W2023871115 hasConceptScore W2023871115C178790620 @default.
- W2023871115 hasConceptScore W2023871115C185592680 @default.
- W2023871115 hasConceptScore W2023871115C191897082 @default.
- W2023871115 hasConceptScore W2023871115C191952053 @default.
- W2023871115 hasConceptScore W2023871115C192562407 @default.
- W2023871115 hasConceptScore W2023871115C200447597 @default.
- W2023871115 hasConceptScore W2023871115C2777855556 @default.
- W2023871115 hasConceptScore W2023871115C2779227376 @default.
- W2023871115 hasConceptScore W2023871115C43617362 @default.
- W2023871115 hasConceptScore W2023871115C49040817 @default.
- W2023871115 hasConceptScore W2023871115C544956773 @default.
- W2023871115 hasConceptScore W2023871115C56052488 @default.
- W2023871115 hasConceptScore W2023871115C57863236 @default.
- W2023871115 hasConceptScore W2023871115C61048295 @default.
- W2023871115 hasConceptScore W2023871115C69357855 @default.
- W2023871115 hasConceptScore W2023871115C8010536 @default.
- W2023871115 hasConceptScore W2023871115C97355855 @default.
- W2023871115 hasIssue "2" @default.
- W2023871115 hasLocation W20238711151 @default.
- W2023871115 hasOpenAccess W2023871115 @default.
- W2023871115 hasPrimaryLocation W20238711151 @default.
- W2023871115 hasRelatedWork W1504216976 @default.
- W2023871115 hasRelatedWork W1971044255 @default.
- W2023871115 hasRelatedWork W1993707847 @default.
- W2023871115 hasRelatedWork W1999813197 @default.
- W2023871115 hasRelatedWork W2001740136 @default.
- W2023871115 hasRelatedWork W2003945358 @default.
- W2023871115 hasRelatedWork W2075220822 @default.
- W2023871115 hasRelatedWork W2088708850 @default.
- W2023871115 hasRelatedWork W2091456555 @default.
- W2023871115 hasRelatedWork W4285085917 @default.
- W2023871115 hasVolume "71" @default.
- W2023871115 isParatext "false" @default.
- W2023871115 isRetracted "false" @default.
- W2023871115 magId "2023871115" @default.
- W2023871115 workType "article" @default.