Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023871799> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2023871799 endingPage "590" @default.
- W2023871799 startingPage "585" @default.
- W2023871799 abstract "Crystalline recovery mechanism in the activation annealing process of Al implanted 4H-SiC crystals were experimentally investigated. Annealing temperature and annealing time dependence of acceptor activation and activated hole’s behavior were examined. Poly-type recovery from the implantation induced lattice disordering during the annealing was investigated. The existence of meta-stable crystalline states for acceptor activation, and related scattering centers due to annealing is reported To achieve 100% acceptor activation and to reduce strain after ion implantation, annealing at 2000°C for 10 min. was required." @default.
- W2023871799 created "2016-06-24" @default.
- W2023871799 creator A5003923018 @default.
- W2023871799 creator A5024333107 @default.
- W2023871799 creator A5061608187 @default.
- W2023871799 creator A5068087984 @default.
- W2023871799 creator A5082621301 @default.
- W2023871799 date "2008-09-01" @default.
- W2023871799 modified "2023-09-27" @default.
- W2023871799 title "Crystalline Recovery after Activation Annealing of Al Implanted 4H-SiC" @default.
- W2023871799 cites W1965589638 @default.
- W2023871799 cites W1975300254 @default.
- W2023871799 cites W1976988790 @default.
- W2023871799 cites W1984271179 @default.
- W2023871799 cites W1990374314 @default.
- W2023871799 cites W1996360298 @default.
- W2023871799 cites W2002654474 @default.
- W2023871799 cites W2029857200 @default.
- W2023871799 cites W2066439780 @default.
- W2023871799 cites W2075979955 @default.
- W2023871799 cites W2123453889 @default.
- W2023871799 cites W2132482740 @default.
- W2023871799 cites W2160286674 @default.
- W2023871799 doi "https://doi.org/10.4028/www.scientific.net/msf.600-603.585" @default.
- W2023871799 hasPublicationYear "2008" @default.
- W2023871799 type Work @default.
- W2023871799 sameAs 2023871799 @default.
- W2023871799 citedByCount "2" @default.
- W2023871799 countsByYear W20238717992020 @default.
- W2023871799 countsByYear W20238717992022 @default.
- W2023871799 crossrefType "journal-article" @default.
- W2023871799 hasAuthorship W2023871799A5003923018 @default.
- W2023871799 hasAuthorship W2023871799A5024333107 @default.
- W2023871799 hasAuthorship W2023871799A5061608187 @default.
- W2023871799 hasAuthorship W2023871799A5068087984 @default.
- W2023871799 hasAuthorship W2023871799A5082621301 @default.
- W2023871799 hasConcept C113196181 @default.
- W2023871799 hasConcept C120665830 @default.
- W2023871799 hasConcept C121332964 @default.
- W2023871799 hasConcept C127413603 @default.
- W2023871799 hasConcept C145148216 @default.
- W2023871799 hasConcept C147789679 @default.
- W2023871799 hasConcept C178790620 @default.
- W2023871799 hasConcept C185592680 @default.
- W2023871799 hasConcept C191486275 @default.
- W2023871799 hasConcept C191897082 @default.
- W2023871799 hasConcept C192562407 @default.
- W2023871799 hasConcept C26873012 @default.
- W2023871799 hasConcept C2777855556 @default.
- W2023871799 hasConcept C2779892579 @default.
- W2023871799 hasConcept C41823505 @default.
- W2023871799 hasConcept C42360764 @default.
- W2023871799 hasConcept C43617362 @default.
- W2023871799 hasConcept C8010536 @default.
- W2023871799 hasConcept C95121573 @default.
- W2023871799 hasConceptScore W2023871799C113196181 @default.
- W2023871799 hasConceptScore W2023871799C120665830 @default.
- W2023871799 hasConceptScore W2023871799C121332964 @default.
- W2023871799 hasConceptScore W2023871799C127413603 @default.
- W2023871799 hasConceptScore W2023871799C145148216 @default.
- W2023871799 hasConceptScore W2023871799C147789679 @default.
- W2023871799 hasConceptScore W2023871799C178790620 @default.
- W2023871799 hasConceptScore W2023871799C185592680 @default.
- W2023871799 hasConceptScore W2023871799C191486275 @default.
- W2023871799 hasConceptScore W2023871799C191897082 @default.
- W2023871799 hasConceptScore W2023871799C192562407 @default.
- W2023871799 hasConceptScore W2023871799C26873012 @default.
- W2023871799 hasConceptScore W2023871799C2777855556 @default.
- W2023871799 hasConceptScore W2023871799C2779892579 @default.
- W2023871799 hasConceptScore W2023871799C41823505 @default.
- W2023871799 hasConceptScore W2023871799C42360764 @default.
- W2023871799 hasConceptScore W2023871799C43617362 @default.
- W2023871799 hasConceptScore W2023871799C8010536 @default.
- W2023871799 hasConceptScore W2023871799C95121573 @default.
- W2023871799 hasLocation W20238717991 @default.
- W2023871799 hasOpenAccess W2023871799 @default.
- W2023871799 hasPrimaryLocation W20238717991 @default.
- W2023871799 hasRelatedWork W1616992653 @default.
- W2023871799 hasRelatedWork W1967375645 @default.
- W2023871799 hasRelatedWork W1973545702 @default.
- W2023871799 hasRelatedWork W2048867833 @default.
- W2023871799 hasRelatedWork W2052843275 @default.
- W2023871799 hasRelatedWork W2064155888 @default.
- W2023871799 hasRelatedWork W2074003831 @default.
- W2023871799 hasRelatedWork W2082864020 @default.
- W2023871799 hasRelatedWork W2464888689 @default.
- W2023871799 hasRelatedWork W2772807336 @default.
- W2023871799 hasVolume "600-603" @default.
- W2023871799 isParatext "false" @default.
- W2023871799 isRetracted "false" @default.
- W2023871799 magId "2023871799" @default.
- W2023871799 workType "article" @default.