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- W2023895540 abstract "Reaction of low energy (7.5–100 eV) mass-selected N+2 beams with polycrystalline Mo, which was pre-treated by (a) sputtering the surface (SS) - by an Ar+ beam or (b) flashing the surface (FS) - to ∼1500°C, resulted in formation of different thin molybdenum nitride layers. These differences are as follows: The nitride film on the SS sample is thicker and more homogeneous than that on the FS sample, thus yielding a lower nitrogen AES signal (due to the lower surface nitrogen concentration) for the same N+2 dose. The saturation dose and saturation nitrogen AES signal are both higher for the SS sample due to the larger effective area of the rough surface for reaction with N+2 ions. The higher efficiency of the rougher surface for ion capture is compensated by the higher efficiency for Auger electron capture, thus giving about the same low-dose slope of the N signal versus N+2 dose for both the SS and FS samples. The 100 eV N+2 beam appears to form a nitride layer which is comparable in thickness to the radiation damaged layer, thus reducing the differences between the films on the SS and FS samples for this particular beam energy." @default.
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- W2023895540 date "1982-07-01" @default.
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- W2023895540 title "Surface pre-treatment dependent formation of molybdenum nitride by low energy N+2 ion bombardment" @default.
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- W2023895540 doi "https://doi.org/10.1016/0378-5963(82)90069-1" @default.
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