Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023921704> ?p ?o ?g. }
- W2023921704 abstract "We demonstrate the thinnest ever reported Cu diffusion barrier, a 1-nm-thick graphene tri-layer. X-ray diffraction patterns and Raman spectra show that the graphene is thermally stable at up to 750 °C against Cu diffusion. Transmission electron microscopy images show that there was no inter-diffusion in the Cu/graphene/Si structure. Raman analyses indicate that the graphene may have degraded into a nanocrystalline structure at 750 °C. At 800 °C, the perfect carbon structure was damaged, and thus the barrier failed. The results of this study suggest that graphene could be the ultimate Cu interconnect diffusion barrier." @default.
- W2023921704 created "2016-06-24" @default.
- W2023921704 creator A5030229897 @default.
- W2023921704 creator A5032085099 @default.
- W2023921704 creator A5070250257 @default.
- W2023921704 date "2014-02-24" @default.
- W2023921704 modified "2023-10-10" @default.
- W2023921704 title "1-nm-thick graphene tri-layer as the ultimate copper diffusion barrier" @default.
- W2023921704 cites W1972354739 @default.
- W2023921704 cites W1981044502 @default.
- W2023921704 cites W1986980084 @default.
- W2023921704 cites W1989189480 @default.
- W2023921704 cites W2006555212 @default.
- W2023921704 cites W2006883307 @default.
- W2023921704 cites W2010971702 @default.
- W2023921704 cites W2014694192 @default.
- W2023921704 cites W2014935324 @default.
- W2023921704 cites W2015100623 @default.
- W2023921704 cites W2019126372 @default.
- W2023921704 cites W2019460060 @default.
- W2023921704 cites W2028783209 @default.
- W2023921704 cites W2032100140 @default.
- W2023921704 cites W2037183768 @default.
- W2023921704 cites W2044783755 @default.
- W2023921704 cites W2045298557 @default.
- W2023921704 cites W2049194836 @default.
- W2023921704 cites W2050662681 @default.
- W2023921704 cites W2056176351 @default.
- W2023921704 cites W2057329623 @default.
- W2023921704 cites W2065308677 @default.
- W2023921704 cites W2068854787 @default.
- W2023921704 cites W2071848672 @default.
- W2023921704 cites W2072836371 @default.
- W2023921704 cites W2073254867 @default.
- W2023921704 cites W2074684620 @default.
- W2023921704 cites W2075807108 @default.
- W2023921704 cites W2079874183 @default.
- W2023921704 cites W2087510768 @default.
- W2023921704 cites W2092188263 @default.
- W2023921704 cites W2094046092 @default.
- W2023921704 cites W2094778736 @default.
- W2023921704 cites W2099779584 @default.
- W2023921704 cites W2105685140 @default.
- W2023921704 cites W2114351820 @default.
- W2023921704 cites W2139393388 @default.
- W2023921704 cites W2145840362 @default.
- W2023921704 cites W2146564548 @default.
- W2023921704 cites W2151963176 @default.
- W2023921704 cites W2163980958 @default.
- W2023921704 cites W2313244895 @default.
- W2023921704 cites W3099854949 @default.
- W2023921704 cites W3102015240 @default.
- W2023921704 doi "https://doi.org/10.1063/1.4866857" @default.
- W2023921704 hasPublicationYear "2014" @default.
- W2023921704 type Work @default.
- W2023921704 sameAs 2023921704 @default.
- W2023921704 citedByCount "59" @default.
- W2023921704 countsByYear W20239217042014 @default.
- W2023921704 countsByYear W20239217042015 @default.
- W2023921704 countsByYear W20239217042016 @default.
- W2023921704 countsByYear W20239217042017 @default.
- W2023921704 countsByYear W20239217042018 @default.
- W2023921704 countsByYear W20239217042019 @default.
- W2023921704 countsByYear W20239217042020 @default.
- W2023921704 countsByYear W20239217042021 @default.
- W2023921704 countsByYear W20239217042022 @default.
- W2023921704 countsByYear W20239217042023 @default.
- W2023921704 crossrefType "journal-article" @default.
- W2023921704 hasAuthorship W2023921704A5030229897 @default.
- W2023921704 hasAuthorship W2023921704A5032085099 @default.
- W2023921704 hasAuthorship W2023921704A5070250257 @default.
- W2023921704 hasConcept C120665830 @default.
- W2023921704 hasConcept C121332964 @default.
- W2023921704 hasConcept C140676511 @default.
- W2023921704 hasConcept C140807948 @default.
- W2023921704 hasConcept C146088050 @default.
- W2023921704 hasConcept C171250308 @default.
- W2023921704 hasConcept C191897082 @default.
- W2023921704 hasConcept C192562407 @default.
- W2023921704 hasConcept C2778836790 @default.
- W2023921704 hasConcept C2779227376 @default.
- W2023921704 hasConcept C2779833192 @default.
- W2023921704 hasConcept C30080830 @default.
- W2023921704 hasConcept C40003534 @default.
- W2023921704 hasConcept C544778455 @default.
- W2023921704 hasConcept C69357855 @default.
- W2023921704 hasConcept C97355855 @default.
- W2023921704 hasConceptScore W2023921704C120665830 @default.
- W2023921704 hasConceptScore W2023921704C121332964 @default.
- W2023921704 hasConceptScore W2023921704C140676511 @default.
- W2023921704 hasConceptScore W2023921704C140807948 @default.
- W2023921704 hasConceptScore W2023921704C146088050 @default.
- W2023921704 hasConceptScore W2023921704C171250308 @default.
- W2023921704 hasConceptScore W2023921704C191897082 @default.
- W2023921704 hasConceptScore W2023921704C192562407 @default.
- W2023921704 hasConceptScore W2023921704C2778836790 @default.
- W2023921704 hasConceptScore W2023921704C2779227376 @default.
- W2023921704 hasConceptScore W2023921704C2779833192 @default.
- W2023921704 hasConceptScore W2023921704C30080830 @default.
- W2023921704 hasConceptScore W2023921704C40003534 @default.