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- W2023937504 abstract "Cylindrical directed self-assembly (DSA) nanostructures is a promising candidate for patterning the contacts and vias in integrated circuits. To match the contact patterns in an IC layout, physical guiding templates have been adopted to generate aperiodic DSA patterns, and templates of different sizes could lead to various DSA patterns. It is found in the experiment that the density of guiding templates has a strong influence on the DSA patterns. At a low template density, templates tend to become overfilled and result in DSA defects. In this paper, we experimentally demonstrate an effective solution to counteract the influence of template pattern density on the quality of DSA using sub-DSA-resolution Assist Features (SDRAFs). We show that SDRAFs can reduce the DSA defects significantly." @default.
- W2023937504 created "2016-06-24" @default.
- W2023937504 creator A5018621003 @default.
- W2023937504 creator A5024014942 @default.
- W2023937504 creator A5039538018 @default.
- W2023937504 creator A5041427178 @default.
- W2023937504 creator A5051148994 @default.
- W2023937504 creator A5059975258 @default.
- W2023937504 date "2015-03-19" @default.
- W2023937504 modified "2023-10-03" @default.
- W2023937504 title "Experimental study of sub-DSA resolution assist features (SDRAF)" @default.
- W2023937504 cites W1992420596 @default.
- W2023937504 cites W2036948901 @default.
- W2023937504 cites W2039474083 @default.
- W2023937504 cites W2039485707 @default.
- W2023937504 cites W2058924583 @default.
- W2023937504 cites W2093847134 @default.
- W2023937504 cites W2118625035 @default.
- W2023937504 cites W2162621384 @default.
- W2023937504 cites W4233417203 @default.
- W2023937504 cites W4248699288 @default.
- W2023937504 cites W4251264148 @default.
- W2023937504 doi "https://doi.org/10.1117/12.2085866" @default.
- W2023937504 hasPublicationYear "2015" @default.
- W2023937504 type Work @default.
- W2023937504 sameAs 2023937504 @default.
- W2023937504 citedByCount "5" @default.
- W2023937504 countsByYear W20239375042015 @default.
- W2023937504 countsByYear W20239375042016 @default.
- W2023937504 countsByYear W20239375042017 @default.
- W2023937504 countsByYear W20239375042018 @default.
- W2023937504 crossrefType "proceedings-article" @default.
- W2023937504 hasAuthorship W2023937504A5018621003 @default.
- W2023937504 hasAuthorship W2023937504A5024014942 @default.
- W2023937504 hasAuthorship W2023937504A5039538018 @default.
- W2023937504 hasAuthorship W2023937504A5041427178 @default.
- W2023937504 hasAuthorship W2023937504A5051148994 @default.
- W2023937504 hasAuthorship W2023937504A5059975258 @default.
- W2023937504 hasConcept C104247578 @default.
- W2023937504 hasConcept C114614502 @default.
- W2023937504 hasConcept C121332964 @default.
- W2023937504 hasConcept C127313418 @default.
- W2023937504 hasConcept C134146338 @default.
- W2023937504 hasConcept C138268822 @default.
- W2023937504 hasConcept C154945302 @default.
- W2023937504 hasConcept C171250308 @default.
- W2023937504 hasConcept C192562407 @default.
- W2023937504 hasConcept C3020199158 @default.
- W2023937504 hasConcept C33923547 @default.
- W2023937504 hasConcept C41008148 @default.
- W2023937504 hasConcept C49040817 @default.
- W2023937504 hasConcept C62520636 @default.
- W2023937504 hasConcept C62649853 @default.
- W2023937504 hasConcept C82714645 @default.
- W2023937504 hasConceptScore W2023937504C104247578 @default.
- W2023937504 hasConceptScore W2023937504C114614502 @default.
- W2023937504 hasConceptScore W2023937504C121332964 @default.
- W2023937504 hasConceptScore W2023937504C127313418 @default.
- W2023937504 hasConceptScore W2023937504C134146338 @default.
- W2023937504 hasConceptScore W2023937504C138268822 @default.
- W2023937504 hasConceptScore W2023937504C154945302 @default.
- W2023937504 hasConceptScore W2023937504C171250308 @default.
- W2023937504 hasConceptScore W2023937504C192562407 @default.
- W2023937504 hasConceptScore W2023937504C3020199158 @default.
- W2023937504 hasConceptScore W2023937504C33923547 @default.
- W2023937504 hasConceptScore W2023937504C41008148 @default.
- W2023937504 hasConceptScore W2023937504C49040817 @default.
- W2023937504 hasConceptScore W2023937504C62520636 @default.
- W2023937504 hasConceptScore W2023937504C62649853 @default.
- W2023937504 hasConceptScore W2023937504C82714645 @default.
- W2023937504 hasLocation W20239375041 @default.
- W2023937504 hasOpenAccess W2023937504 @default.
- W2023937504 hasPrimaryLocation W20239375041 @default.
- W2023937504 hasRelatedWork W1967382107 @default.
- W2023937504 hasRelatedWork W1982381624 @default.
- W2023937504 hasRelatedWork W1996145581 @default.
- W2023937504 hasRelatedWork W2010266518 @default.
- W2023937504 hasRelatedWork W2030680741 @default.
- W2023937504 hasRelatedWork W2033590394 @default.
- W2023937504 hasRelatedWork W2047310281 @default.
- W2023937504 hasRelatedWork W2069569817 @default.
- W2023937504 hasRelatedWork W2083274833 @default.
- W2023937504 hasRelatedWork W2084145289 @default.
- W2023937504 hasRelatedWork W2091829227 @default.
- W2023937504 hasRelatedWork W2309494687 @default.
- W2023937504 hasRelatedWork W2318337955 @default.
- W2023937504 hasRelatedWork W2320360660 @default.
- W2023937504 hasRelatedWork W2325327683 @default.
- W2023937504 hasRelatedWork W2588280786 @default.
- W2023937504 hasRelatedWork W2595663553 @default.
- W2023937504 hasRelatedWork W3117995370 @default.
- W2023937504 hasRelatedWork W3130253126 @default.
- W2023937504 hasRelatedWork W786317269 @default.
- W2023937504 isParatext "false" @default.
- W2023937504 isRetracted "false" @default.
- W2023937504 magId "2023937504" @default.
- W2023937504 workType "article" @default.