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• W2023971617 abstract "The results of detailed calculations of the etch rates for pulsed UV laser ablation of polyimide at 308 nm using several proposed theoretical models of the process are compared with experimental results. The theories which indicate that the etch depth per pulse is dependent on the fluence, and not the peak intensity of the laser pulse, are consistent with the experimental data for laser pulse widths of 7–500 ns. The implication of the results on various aspects of the models is discussed." @default.
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• W2023971617 date "1990-07-01" @default.
• W2023971617 modified "2023-09-25" @default.
• W2023971617 title "Comparison of theoretical models of laser ablation of polyimide with experimental results" @default.
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• W2023971617 doi "https://doi.org/10.1016/0301-0104(90)80108-a" @default.
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