Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023972571> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2023972571 abstract "Effects of plasma pretreatments to the TaSiN film surface on Cu nucleation were investigated. Scanning electron microscopy (SEM) was used to measure the Cu nucleation density and to observe the morphology of the Cu film. X-ray spectroscopy (XPS) and Auger depth profiling analyses were used to investigate the bonding state of atoms and the concentrations of oxygen and nitrogen at the TaSiN film surface, respectively. Cu nucleation in Cu MOCVD is effectively enhanced by treating the underlying Ta-Si-N film surface with hydrogen plasma prior to Cu MOCVD. The Cu nucleation density in Cu MOCVD increases as the rf-power and the plasma exposure time increase in the hydrogen plasma pretreatment, but it is saturated at the rf-power of 40W and the plasma exposure time of 2min. To increase the rf-power and the plasma exposure time further would increase the plasma radiation damage for the Si substrate. Therefore, 40W and 2min are the optimal process conditions for the hydrogen pretreatment. Copper nucleation is enhanced by hydrogen plasma pretreatment because the plasma treatment removes the nitrogen and oxygen atoms from the Ta-Si-N film surface. Since Ta-Si is a substrate more favorable for Cu nucleation than Ta-Si-N(O), Cu nucleation on the Ta-Si-N film is enhanced by hydrogen plasma pretreatment of the Ta-Si-N film surface." @default.
- W2023972571 created "2016-06-24" @default.
- W2023972571 creator A5036066178 @default.
- W2023972571 creator A5049856973 @default.
- W2023972571 creator A5071937012 @default.
- W2023972571 date "2007-02-01" @default.
- W2023972571 modified "2023-10-16" @default.
- W2023972571 title "Pretreatment of the TaSiN Substrate Surface for Copper-MOCVD" @default.
- W2023972571 cites W2003800854 @default.
- W2023972571 cites W2005457713 @default.
- W2023972571 cites W2014475385 @default.
- W2023972571 cites W2026102151 @default.
- W2023972571 cites W2026932574 @default.
- W2023972571 cites W2033702228 @default.
- W2023972571 cites W2052104862 @default.
- W2023972571 cites W2053401394 @default.
- W2023972571 cites W2057892646 @default.
- W2023972571 cites W2063947867 @default.
- W2023972571 cites W2091545311 @default.
- W2023972571 cites W2115609956 @default.
- W2023972571 cites W2138916156 @default.
- W2023972571 doi "https://doi.org/10.4028/www.scientific.net/kem.280-283.911" @default.
- W2023972571 hasPublicationYear "2007" @default.
- W2023972571 type Work @default.
- W2023972571 sameAs 2023972571 @default.
- W2023972571 citedByCount "0" @default.
- W2023972571 crossrefType "journal-article" @default.
- W2023972571 hasAuthorship W2023972571A5036066178 @default.
- W2023972571 hasAuthorship W2023972571A5049856973 @default.
- W2023972571 hasAuthorship W2023972571A5071937012 @default.
- W2023972571 hasConcept C110738630 @default.
- W2023972571 hasConcept C111368507 @default.
- W2023972571 hasConcept C113196181 @default.
- W2023972571 hasConcept C121332964 @default.
- W2023972571 hasConcept C127313418 @default.
- W2023972571 hasConcept C127413603 @default.
- W2023972571 hasConcept C171250308 @default.
- W2023972571 hasConcept C175665537 @default.
- W2023972571 hasConcept C175708663 @default.
- W2023972571 hasConcept C178790620 @default.
- W2023972571 hasConcept C185544564 @default.
- W2023972571 hasConcept C185592680 @default.
- W2023972571 hasConcept C191897082 @default.
- W2023972571 hasConcept C192562407 @default.
- W2023972571 hasConcept C25442681 @default.
- W2023972571 hasConcept C2777289219 @default.
- W2023972571 hasConcept C2779227376 @default.
- W2023972571 hasConcept C42360764 @default.
- W2023972571 hasConcept C43617362 @default.
- W2023972571 hasConcept C512968161 @default.
- W2023972571 hasConcept C544778455 @default.
- W2023972571 hasConcept C61048295 @default.
- W2023972571 hasConcept C62520636 @default.
- W2023972571 hasConcept C82706917 @default.
- W2023972571 hasConcept C95974651 @default.
- W2023972571 hasConceptScore W2023972571C110738630 @default.
- W2023972571 hasConceptScore W2023972571C111368507 @default.
- W2023972571 hasConceptScore W2023972571C113196181 @default.
- W2023972571 hasConceptScore W2023972571C121332964 @default.
- W2023972571 hasConceptScore W2023972571C127313418 @default.
- W2023972571 hasConceptScore W2023972571C127413603 @default.
- W2023972571 hasConceptScore W2023972571C171250308 @default.
- W2023972571 hasConceptScore W2023972571C175665537 @default.
- W2023972571 hasConceptScore W2023972571C175708663 @default.
- W2023972571 hasConceptScore W2023972571C178790620 @default.
- W2023972571 hasConceptScore W2023972571C185544564 @default.
- W2023972571 hasConceptScore W2023972571C185592680 @default.
- W2023972571 hasConceptScore W2023972571C191897082 @default.
- W2023972571 hasConceptScore W2023972571C192562407 @default.
- W2023972571 hasConceptScore W2023972571C25442681 @default.
- W2023972571 hasConceptScore W2023972571C2777289219 @default.
- W2023972571 hasConceptScore W2023972571C2779227376 @default.
- W2023972571 hasConceptScore W2023972571C42360764 @default.
- W2023972571 hasConceptScore W2023972571C43617362 @default.
- W2023972571 hasConceptScore W2023972571C512968161 @default.
- W2023972571 hasConceptScore W2023972571C544778455 @default.
- W2023972571 hasConceptScore W2023972571C61048295 @default.
- W2023972571 hasConceptScore W2023972571C62520636 @default.
- W2023972571 hasConceptScore W2023972571C82706917 @default.
- W2023972571 hasConceptScore W2023972571C95974651 @default.
- W2023972571 hasLocation W20239725711 @default.
- W2023972571 hasOpenAccess W2023972571 @default.
- W2023972571 hasPrimaryLocation W20239725711 @default.
- W2023972571 hasRelatedWork W2002207621 @default.
- W2023972571 hasRelatedWork W2008449801 @default.
- W2023972571 hasRelatedWork W2011567661 @default.
- W2023972571 hasRelatedWork W2022370806 @default.
- W2023972571 hasRelatedWork W2036129315 @default.
- W2023972571 hasRelatedWork W2058735286 @default.
- W2023972571 hasRelatedWork W2068658414 @default.
- W2023972571 hasRelatedWork W2149185475 @default.
- W2023972571 hasRelatedWork W2150998405 @default.
- W2023972571 hasRelatedWork W2538112308 @default.
- W2023972571 isParatext "false" @default.
- W2023972571 isRetracted "false" @default.
- W2023972571 magId "2023972571" @default.
- W2023972571 workType "article" @default.