Matches in SemOpenAlex for { <https://semopenalex.org/work/W2023990952> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2023990952 endingPage "234" @default.
- W2023990952 startingPage "230" @default.
- W2023990952 abstract "Influence of dwell time on focused ion beam (FIB) micromachining process by means of single pixel writing mode sputtering silicon is discussed in this paper. It affects line broadening and sputtering depth during the milling process in silicon material. It is proved by the experimental results that long dwell time leads to deep milling depth due to reducing scanning numbers of pixel. The broadening effect by the wing of Gaussian distribution profile is different from the variation of beam limiting aperture size. In the case of the aperture size 150 μm and below, the effect is little with changing of dwell time. It is obviously serious for large aperture size with the short dwell times of less than 3 μs." @default.
- W2023990952 created "2016-06-24" @default.
- W2023990952 creator A5031688796 @default.
- W2023990952 creator A5034184015 @default.
- W2023990952 creator A5047677906 @default.
- W2023990952 creator A5057117162 @default.
- W2023990952 date "2000-02-01" @default.
- W2023990952 modified "2023-10-16" @default.
- W2023990952 title "Influence analysis of dwell time on focused ion beam micromachining in silicon" @default.
- W2023990952 cites W1966139058 @default.
- W2023990952 cites W2067988890 @default.
- W2023990952 cites W2078428305 @default.
- W2023990952 doi "https://doi.org/10.1016/s0924-4247(99)00282-4" @default.
- W2023990952 hasPublicationYear "2000" @default.
- W2023990952 type Work @default.
- W2023990952 sameAs 2023990952 @default.
- W2023990952 citedByCount "29" @default.
- W2023990952 countsByYear W20239909522012 @default.
- W2023990952 countsByYear W20239909522013 @default.
- W2023990952 countsByYear W20239909522018 @default.
- W2023990952 countsByYear W20239909522019 @default.
- W2023990952 countsByYear W20239909522020 @default.
- W2023990952 countsByYear W20239909522022 @default.
- W2023990952 crossrefType "journal-article" @default.
- W2023990952 hasAuthorship W2023990952A5031688796 @default.
- W2023990952 hasAuthorship W2023990952A5034184015 @default.
- W2023990952 hasAuthorship W2023990952A5047677906 @default.
- W2023990952 hasAuthorship W2023990952A5057117162 @default.
- W2023990952 hasConcept C120665830 @default.
- W2023990952 hasConcept C121332964 @default.
- W2023990952 hasConcept C136525101 @default.
- W2023990952 hasConcept C142724271 @default.
- W2023990952 hasConcept C145148216 @default.
- W2023990952 hasConcept C145667562 @default.
- W2023990952 hasConcept C151637689 @default.
- W2023990952 hasConcept C161866238 @default.
- W2023990952 hasConcept C168834538 @default.
- W2023990952 hasConcept C171250308 @default.
- W2023990952 hasConcept C178790620 @default.
- W2023990952 hasConcept C185592680 @default.
- W2023990952 hasConcept C19067145 @default.
- W2023990952 hasConcept C192562407 @default.
- W2023990952 hasConcept C204787440 @default.
- W2023990952 hasConcept C22423302 @default.
- W2023990952 hasConcept C24890656 @default.
- W2023990952 hasConcept C49040817 @default.
- W2023990952 hasConcept C50774322 @default.
- W2023990952 hasConcept C544956773 @default.
- W2023990952 hasConcept C70410870 @default.
- W2023990952 hasConcept C71924100 @default.
- W2023990952 hasConcept C78336883 @default.
- W2023990952 hasConceptScore W2023990952C120665830 @default.
- W2023990952 hasConceptScore W2023990952C121332964 @default.
- W2023990952 hasConceptScore W2023990952C136525101 @default.
- W2023990952 hasConceptScore W2023990952C142724271 @default.
- W2023990952 hasConceptScore W2023990952C145148216 @default.
- W2023990952 hasConceptScore W2023990952C145667562 @default.
- W2023990952 hasConceptScore W2023990952C151637689 @default.
- W2023990952 hasConceptScore W2023990952C161866238 @default.
- W2023990952 hasConceptScore W2023990952C168834538 @default.
- W2023990952 hasConceptScore W2023990952C171250308 @default.
- W2023990952 hasConceptScore W2023990952C178790620 @default.
- W2023990952 hasConceptScore W2023990952C185592680 @default.
- W2023990952 hasConceptScore W2023990952C19067145 @default.
- W2023990952 hasConceptScore W2023990952C192562407 @default.
- W2023990952 hasConceptScore W2023990952C204787440 @default.
- W2023990952 hasConceptScore W2023990952C22423302 @default.
- W2023990952 hasConceptScore W2023990952C24890656 @default.
- W2023990952 hasConceptScore W2023990952C49040817 @default.
- W2023990952 hasConceptScore W2023990952C50774322 @default.
- W2023990952 hasConceptScore W2023990952C544956773 @default.
- W2023990952 hasConceptScore W2023990952C70410870 @default.
- W2023990952 hasConceptScore W2023990952C71924100 @default.
- W2023990952 hasConceptScore W2023990952C78336883 @default.
- W2023990952 hasIssue "3" @default.
- W2023990952 hasLocation W20239909521 @default.
- W2023990952 hasOpenAccess W2023990952 @default.
- W2023990952 hasPrimaryLocation W20239909521 @default.
- W2023990952 hasRelatedWork W142065027 @default.
- W2023990952 hasRelatedWork W1762750881 @default.
- W2023990952 hasRelatedWork W1997218734 @default.
- W2023990952 hasRelatedWork W2009319009 @default.
- W2023990952 hasRelatedWork W2027052784 @default.
- W2023990952 hasRelatedWork W2044345964 @default.
- W2023990952 hasRelatedWork W2724302003 @default.
- W2023990952 hasRelatedWork W2909664680 @default.
- W2023990952 hasRelatedWork W3012197531 @default.
- W2023990952 hasRelatedWork W3039334009 @default.
- W2023990952 hasVolume "79" @default.
- W2023990952 isParatext "false" @default.
- W2023990952 isRetracted "false" @default.
- W2023990952 magId "2023990952" @default.
- W2023990952 workType "article" @default.