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- W2023996326 abstract "Abstract An undulator-radiation-excited X-ray fluorescence analysis system has been developed at an undulator beamline of the Photon Factory. As an analytical application demonstrating the capabilities of this system, the chemical state of boron implanted with a high dosage of BF 2 + into Si(100) was analyzed by measuring both the B Kα soft X-ray emission (SXE) and X-ray absorption near edge structure (XANES) with fluorescence detection. Comparing the SXE and fluorescence XANES spectra of B doped in Si with relevant reference boron compounds, it is confirmed that the chemical state of the B atoms as implanted in Si is metallic despite the fact that B is implanted as BF + 2 . Oxidation of B doped in Si by annealing at 900° C in atmosphere is also observed." @default.
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- W2023996326 date "1993-04-01" @default.
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- W2023996326 title "Chemical state analysis of light elements by undulator-radiation- excited X-ray fluorescence" @default.
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