Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024004038> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2024004038 endingPage "4177" @default.
- W2024004038 startingPage "4172" @default.
- W2024004038 abstract "The interface state density of metal-nitride-oxide-silicon (MNOS) devices was investigated as a function of silicon nitride (Si3N4) deposition temperature and postdeposition annealing conditions. The interface state density around the midgap of the oxide-silicon interface of the MNOS structures as a function of deposition temperature between 650 to 850 °C increased from 1.1 to 8.2×1011 cm−2 eV−1, for as-deposited silicon nitride films,; but decreased from 5.0 to 3.5×1011 cm−2 eV−1, for films annealed in nitrogen at 900 °C for 60 min; and further decreased and remained constant at 1.5×1011 cm−2 eV−1, for films which were further annealed in hydrogen at 900 °C for an additional 60 min. The interface state density increase is due to an increase in the loss of hydrogen at the interfacial region and also due to an increase in the thermal stress caused by differences in thermal expansion coefficients of silicon nitride and silicon dioxide films at higher deposition temperatures. The interface state density is subject to two opposing influences; an increase by thermal stress, and a reduction by hydrogen compensation of these states. Thus either low-temperature processing or subsequent hydrogen annealing after high processing temperatures is warranted." @default.
- W2024004038 created "2016-06-24" @default.
- W2024004038 creator A5003697180 @default.
- W2024004038 creator A5050437948 @default.
- W2024004038 date "1990-10-15" @default.
- W2024004038 modified "2023-09-24" @default.
- W2024004038 title "Interface state densities for metal-nitride-oxide-silicon devices" @default.
- W2024004038 cites W1965904558 @default.
- W2024004038 cites W1985348746 @default.
- W2024004038 cites W1999032671 @default.
- W2024004038 cites W2012874316 @default.
- W2024004038 cites W2020299754 @default.
- W2024004038 cites W2023743533 @default.
- W2024004038 cites W2042002599 @default.
- W2024004038 cites W2066845745 @default.
- W2024004038 cites W2074340492 @default.
- W2024004038 cites W2079033577 @default.
- W2024004038 cites W2079432293 @default.
- W2024004038 cites W3150034503 @default.
- W2024004038 doi "https://doi.org/10.1063/1.346231" @default.
- W2024004038 hasPublicationYear "1990" @default.
- W2024004038 type Work @default.
- W2024004038 sameAs 2024004038 @default.
- W2024004038 citedByCount "4" @default.
- W2024004038 crossrefType "journal-article" @default.
- W2024004038 hasAuthorship W2024004038A5003697180 @default.
- W2024004038 hasAuthorship W2024004038A5050437948 @default.
- W2024004038 hasConcept C113196181 @default.
- W2024004038 hasConcept C159985019 @default.
- W2024004038 hasConcept C171250308 @default.
- W2024004038 hasConcept C178790620 @default.
- W2024004038 hasConcept C185592680 @default.
- W2024004038 hasConcept C191897082 @default.
- W2024004038 hasConcept C192245399 @default.
- W2024004038 hasConcept C192562407 @default.
- W2024004038 hasConcept C194760766 @default.
- W2024004038 hasConcept C2776390347 @default.
- W2024004038 hasConcept C2777431650 @default.
- W2024004038 hasConcept C2777855556 @default.
- W2024004038 hasConcept C2779227376 @default.
- W2024004038 hasConcept C2779667780 @default.
- W2024004038 hasConcept C2779851234 @default.
- W2024004038 hasConcept C43617362 @default.
- W2024004038 hasConcept C49040817 @default.
- W2024004038 hasConcept C512968161 @default.
- W2024004038 hasConcept C544956773 @default.
- W2024004038 hasConcept C57410435 @default.
- W2024004038 hasConceptScore W2024004038C113196181 @default.
- W2024004038 hasConceptScore W2024004038C159985019 @default.
- W2024004038 hasConceptScore W2024004038C171250308 @default.
- W2024004038 hasConceptScore W2024004038C178790620 @default.
- W2024004038 hasConceptScore W2024004038C185592680 @default.
- W2024004038 hasConceptScore W2024004038C191897082 @default.
- W2024004038 hasConceptScore W2024004038C192245399 @default.
- W2024004038 hasConceptScore W2024004038C192562407 @default.
- W2024004038 hasConceptScore W2024004038C194760766 @default.
- W2024004038 hasConceptScore W2024004038C2776390347 @default.
- W2024004038 hasConceptScore W2024004038C2777431650 @default.
- W2024004038 hasConceptScore W2024004038C2777855556 @default.
- W2024004038 hasConceptScore W2024004038C2779227376 @default.
- W2024004038 hasConceptScore W2024004038C2779667780 @default.
- W2024004038 hasConceptScore W2024004038C2779851234 @default.
- W2024004038 hasConceptScore W2024004038C43617362 @default.
- W2024004038 hasConceptScore W2024004038C49040817 @default.
- W2024004038 hasConceptScore W2024004038C512968161 @default.
- W2024004038 hasConceptScore W2024004038C544956773 @default.
- W2024004038 hasConceptScore W2024004038C57410435 @default.
- W2024004038 hasIssue "8" @default.
- W2024004038 hasLocation W20240040381 @default.
- W2024004038 hasOpenAccess W2024004038 @default.
- W2024004038 hasPrimaryLocation W20240040381 @default.
- W2024004038 hasRelatedWork W2002070225 @default.
- W2024004038 hasRelatedWork W2004004508 @default.
- W2024004038 hasRelatedWork W2011205543 @default.
- W2024004038 hasRelatedWork W2042925312 @default.
- W2024004038 hasRelatedWork W2047419630 @default.
- W2024004038 hasRelatedWork W2068716588 @default.
- W2024004038 hasRelatedWork W2077318395 @default.
- W2024004038 hasRelatedWork W2591945551 @default.
- W2024004038 hasRelatedWork W2944208507 @default.
- W2024004038 hasRelatedWork W4225347794 @default.
- W2024004038 hasVolume "68" @default.
- W2024004038 isParatext "false" @default.
- W2024004038 isRetracted "false" @default.
- W2024004038 magId "2024004038" @default.
- W2024004038 workType "article" @default.