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• W2024078045 endingPage "7201" @default.
• W2024078045 startingPage "7195" @default.
• W2024078045 abstract "By applying ellipsometry and extending the measurements from visible to mid infrared spectral range we examined the complex dielectric function of thin layers grown into silicon. The layers were synthesized by high-temperature (1050 °C) annealing in oxidizing ambient of plasma immersion N+ ion implanted Si substrates. SiN, SiNO and SiSi chemical bonds in the silicon oxide network were identified and confirmed by X-ray photoelectron spectroscopy (XPS). Depending on N+ fluence (1016–1018 N+/cm2) and annealing duration (10 and 20 min) the grown layers were identified either as silicon oxynitride with considerably low N content or silicon dioxide enriched with nitrogen." @default.
• W2024078045 created "2016-06-24" @default.
• W2024078045 creator A5011176012 @default.
• W2024078045 creator A5024983356 @default.
• W2024078045 creator A5027431619 @default.
• W2024078045 creator A5034011776 @default.
• W2024078045 creator A5034339338 @default.
• W2024078045 creator A5041283329 @default.
• W2024078045 creator A5076707230 @default.
• W2024078045 creator A5083650190 @default.
• W2024078045 creator A5089702347 @default.
• W2024078045 date "2012-07-01" @default.
• W2024078045 modified "2023-10-13" @default.
• W2024078045 title "Infrared ellipsometry as an investigation tool of thin layers grown into plasma immersion N+ implanted silicon" @default.
• W2024078045 cites W1984221556 @default.
• W2024078045 cites W1994890477 @default.
• W2024078045 cites W1997842518 @default.
• W2024078045 cites W2014859184 @default.
• W2024078045 cites W2017836716 @default.
• W2024078045 cites W2052005563 @default.
• W2024078045 cites W2056164119 @default.
• W2024078045 cites W2058547360 @default.
• W2024078045 cites W2059351566 @default.
• W2024078045 cites W2060875534 @default.
• W2024078045 cites W2061661918 @default.
• W2024078045 cites W2062306573 @default.
• W2024078045 cites W2065446083 @default.
• W2024078045 cites W2069636681 @default.
• W2024078045 cites W2079288893 @default.
• W2024078045 cites W2083721283 @default.
• W2024078045 cites W2084859217 @default.
• W2024078045 cites W2087274540 @default.
• W2024078045 cites W2087659756 @default.
• W2024078045 cites W2089535901 @default.
• W2024078045 cites W2094728844 @default.
• W2024078045 cites W2128887339 @default.
• W2024078045 cites W2138811623 @default.
• W2024078045 doi "https://doi.org/10.1016/j.apsusc.2012.04.033" @default.
• W2024078045 hasPublicationYear "2012" @default.
• W2024078045 type Work @default.
• W2024078045 sameAs 2024078045 @default.
• W2024078045 citedByCount "5" @default.
• W2024078045 countsByYear W20240780452014 @default.
• W2024078045 crossrefType "journal-article" @default.
• W2024078045 hasAuthorship W2024078045A5011176012 @default.
• W2024078045 hasAuthorship W2024078045A5024983356 @default.
• W2024078045 hasAuthorship W2024078045A5027431619 @default.
• W2024078045 hasAuthorship W2024078045A5034011776 @default.
• W2024078045 hasAuthorship W2024078045A5034339338 @default.
• W2024078045 hasAuthorship W2024078045A5041283329 @default.
• W2024078045 hasAuthorship W2024078045A5076707230 @default.
• W2024078045 hasAuthorship W2024078045A5083650190 @default.
• W2024078045 hasAuthorship W2024078045A5089702347 @default.
• W2024078045 hasConcept C113196181 @default.
• W2024078045 hasConcept C120665830 @default.
• W2024078045 hasConcept C121332964 @default.
• W2024078045 hasConcept C127413603 @default.
• W2024078045 hasConcept C145148216 @default.
• W2024078045 hasConcept C153642686 @default.
• W2024078045 hasConcept C158355884 @default.
• W2024078045 hasConcept C171250308 @default.
• W2024078045 hasConcept C175708663 @default.
• W2024078045 hasConcept C178790620 @default.
• W2024078045 hasConcept C18293161 @default.
• W2024078045 hasConcept C185592680 @default.
• W2024078045 hasConcept C19067145 @default.
• W2024078045 hasConcept C191897082 @default.
• W2024078045 hasConcept C192562407 @default.
• W2024078045 hasConcept C2777431650 @default.
• W2024078045 hasConcept C2777855556 @default.
• W2024078045 hasConcept C2778702798 @default.
• W2024078045 hasConcept C2779089622 @default.
• W2024078045 hasConcept C2779105228 @default.
• W2024078045 hasConcept C2779476251 @default.
• W2024078045 hasConcept C41823505 @default.
• W2024078045 hasConcept C42360764 @default.
• W2024078045 hasConcept C43617362 @default.
• W2024078045 hasConcept C49040817 @default.
• W2024078045 hasConcept C544956773 @default.
• W2024078045 hasConcept C62520636 @default.
• W2024078045 hasConcept C82706917 @default.
• W2024078045 hasConceptScore W2024078045C113196181 @default.
• W2024078045 hasConceptScore W2024078045C120665830 @default.
• W2024078045 hasConceptScore W2024078045C121332964 @default.
• W2024078045 hasConceptScore W2024078045C127413603 @default.
• W2024078045 hasConceptScore W2024078045C145148216 @default.
• W2024078045 hasConceptScore W2024078045C153642686 @default.
• W2024078045 hasConceptScore W2024078045C158355884 @default.
• W2024078045 hasConceptScore W2024078045C171250308 @default.
• W2024078045 hasConceptScore W2024078045C175708663 @default.
• W2024078045 hasConceptScore W2024078045C178790620 @default.
• W2024078045 hasConceptScore W2024078045C18293161 @default.
• W2024078045 hasConceptScore W2024078045C185592680 @default.
• W2024078045 hasConceptScore W2024078045C19067145 @default.
• W2024078045 hasConceptScore W2024078045C191897082 @default.
• W2024078045 hasConceptScore W2024078045C192562407 @default.
• W2024078045 hasConceptScore W2024078045C2777431650 @default.
• W2024078045 hasConceptScore W2024078045C2777855556 @default.

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