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- W2024086170 abstract "This paper presents a three axis capacitive MEMS accelerometer including individual lateral and vertical accelerometers in a same die. The three axis capacitive MEMS accelerometer is fabricated by utilizing a glass-silicon-glass multi-stack formed by a fabrication process depending on the double glass modified silicon on glass process (DGM-SOG), where the structural layer is selected to be 35 μm thick <;111> silicon. The fabrication process uses the Au-Si eutectic bonding in the last step of the formation of the glass-silicon-glass multi-stack, eliminating the stiction risk of the suspended silicon structures to the top glass with the voltage free feature of the Au-Si eutectic bonding method, allowing to implement 2 μm capacitive gaps for the vertical accelerometers without any pull in during fabrication, while matching 2μιη capacitive gaps of the lateral accelerometers. The top glass wafer allows implementing not only a top electrode for the vertical accelerometer, but also a cap for the entire structure. The fabricated three axis MEMS capacitive accelerometer die is 12×7×1 mm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sup> . Measured capacitances of the lateral and the vertical accelerometers are 9.4 pF and 7.4 pF, but their capacitance change is similar to each other, as they are approximately measured as 90 fF/V and 100 fF/V, respectively. The Brownian noise of the lateral and vertical are estimated to be 6 Mg/√Hz and 7.6 Mg/√Hz, respectively." @default.
- W2024086170 created "2016-06-24" @default.
- W2024086170 creator A5082854551 @default.
- W2024086170 creator A5088069735 @default.
- W2024086170 date "2013-11-01" @default.
- W2024086170 modified "2023-09-24" @default.
- W2024086170 title "Fabrication of a sandwich type three axis capacitive MEMS accelerometer" @default.
- W2024086170 cites W2016005520 @default.
- W2024086170 cites W2016189502 @default.
- W2024086170 cites W2025426824 @default.
- W2024086170 cites W2039739991 @default.
- W2024086170 cites W2040388446 @default.
- W2024086170 cites W2043419718 @default.
- W2024086170 cites W2080737417 @default.
- W2024086170 doi "https://doi.org/10.1109/icsens.2013.6688598" @default.
- W2024086170 hasPublicationYear "2013" @default.
- W2024086170 type Work @default.
- W2024086170 sameAs 2024086170 @default.
- W2024086170 citedByCount "6" @default.
- W2024086170 countsByYear W20240861702015 @default.
- W2024086170 countsByYear W20240861702016 @default.
- W2024086170 countsByYear W20240861702017 @default.
- W2024086170 countsByYear W20240861702018 @default.
- W2024086170 countsByYear W20240861702023 @default.
- W2024086170 crossrefType "proceedings-article" @default.
- W2024086170 hasAuthorship W2024086170A5082854551 @default.
- W2024086170 hasAuthorship W2024086170A5088069735 @default.
- W2024086170 hasConcept C100460472 @default.
- W2024086170 hasConcept C111919701 @default.
- W2024086170 hasConcept C119599485 @default.
- W2024086170 hasConcept C121332964 @default.
- W2024086170 hasConcept C127413603 @default.
- W2024086170 hasConcept C136525101 @default.
- W2024086170 hasConcept C142724271 @default.
- W2024086170 hasConcept C160671074 @default.
- W2024086170 hasConcept C171250308 @default.
- W2024086170 hasConcept C17525397 @default.
- W2024086170 hasConcept C192562407 @default.
- W2024086170 hasConcept C201414436 @default.
- W2024086170 hasConcept C204787440 @default.
- W2024086170 hasConcept C206755178 @default.
- W2024086170 hasConcept C2779227376 @default.
- W2024086170 hasConcept C30066665 @default.
- W2024086170 hasConcept C37977207 @default.
- W2024086170 hasConcept C41008148 @default.
- W2024086170 hasConcept C49040817 @default.
- W2024086170 hasConcept C544956773 @default.
- W2024086170 hasConcept C62520636 @default.
- W2024086170 hasConcept C71924100 @default.
- W2024086170 hasConcept C89805583 @default.
- W2024086170 hasConceptScore W2024086170C100460472 @default.
- W2024086170 hasConceptScore W2024086170C111919701 @default.
- W2024086170 hasConceptScore W2024086170C119599485 @default.
- W2024086170 hasConceptScore W2024086170C121332964 @default.
- W2024086170 hasConceptScore W2024086170C127413603 @default.
- W2024086170 hasConceptScore W2024086170C136525101 @default.
- W2024086170 hasConceptScore W2024086170C142724271 @default.
- W2024086170 hasConceptScore W2024086170C160671074 @default.
- W2024086170 hasConceptScore W2024086170C171250308 @default.
- W2024086170 hasConceptScore W2024086170C17525397 @default.
- W2024086170 hasConceptScore W2024086170C192562407 @default.
- W2024086170 hasConceptScore W2024086170C201414436 @default.
- W2024086170 hasConceptScore W2024086170C204787440 @default.
- W2024086170 hasConceptScore W2024086170C206755178 @default.
- W2024086170 hasConceptScore W2024086170C2779227376 @default.
- W2024086170 hasConceptScore W2024086170C30066665 @default.
- W2024086170 hasConceptScore W2024086170C37977207 @default.
- W2024086170 hasConceptScore W2024086170C41008148 @default.
- W2024086170 hasConceptScore W2024086170C49040817 @default.
- W2024086170 hasConceptScore W2024086170C544956773 @default.
- W2024086170 hasConceptScore W2024086170C62520636 @default.
- W2024086170 hasConceptScore W2024086170C71924100 @default.
- W2024086170 hasConceptScore W2024086170C89805583 @default.
- W2024086170 hasLocation W20240861701 @default.
- W2024086170 hasOpenAccess W2024086170 @default.
- W2024086170 hasPrimaryLocation W20240861701 @default.
- W2024086170 hasRelatedWork W1965527644 @default.
- W2024086170 hasRelatedWork W2025426824 @default.
- W2024086170 hasRelatedWork W2041625964 @default.
- W2024086170 hasRelatedWork W2159370285 @default.
- W2024086170 hasRelatedWork W2329416156 @default.
- W2024086170 hasRelatedWork W2346745324 @default.
- W2024086170 hasRelatedWork W2392205360 @default.
- W2024086170 hasRelatedWork W2534226672 @default.
- W2024086170 hasRelatedWork W2911329264 @default.
- W2024086170 hasRelatedWork W2922271745 @default.
- W2024086170 isParatext "false" @default.
- W2024086170 isRetracted "false" @default.
- W2024086170 magId "2024086170" @default.
- W2024086170 workType "article" @default.