Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024103248> ?p ?o ?g. }
- W2024103248 endingPage "045007" @default.
- W2024103248 startingPage "045007" @default.
- W2024103248 abstract "Epitaxial layers of aluminium nitride (AlN) grown on sapphire by hydride vapour phase epitaxy (HVPE) were implanted with 100 keV hydrogen, H+2, ions with doses in the range of 5 × 1016–2.5 × 1017 cm−2 and subsequently annealed in ambient air at temperatures between 450 and 750 °C in order to determine the kinetics of surface blister formation in AlN. The Arrhenius plot of the blistering time versus temperature shows two different activation energies for the formation of surface blisters: 0.44 eV in the higher temperature regime of 550–750 °C and 1.16 eV in the lower temperature regime of 450–550 °C. The implantation-induced damage was analyzed by cross-sectional transmission electron microscopy, which revealed a band of defects extending from 330 to 550 nm from the surface of AlN. The XTEM image of the implanted and annealed AlN displayed clearly the formation of microcracks that ultimately lead to the formation of surface blisters." @default.
- W2024103248 created "2016-06-24" @default.
- W2024103248 creator A5020171024 @default.
- W2024103248 creator A5026609783 @default.
- W2024103248 creator A5039155812 @default.
- W2024103248 creator A5050092732 @default.
- W2024103248 date "2008-02-25" @default.
- W2024103248 modified "2023-10-08" @default.
- W2024103248 title "Investigation of blistering kinetics in hydrogen implanted aluminium nitride" @default.
- W2024103248 cites W1973671776 @default.
- W2024103248 cites W1979301094 @default.
- W2024103248 cites W1985399871 @default.
- W2024103248 cites W1987478300 @default.
- W2024103248 cites W1994684381 @default.
- W2024103248 cites W2001476737 @default.
- W2024103248 cites W2008715525 @default.
- W2024103248 cites W2026179820 @default.
- W2024103248 cites W2029984698 @default.
- W2024103248 cites W2038222956 @default.
- W2024103248 cites W2065370366 @default.
- W2024103248 cites W2072788389 @default.
- W2024103248 cites W2077587538 @default.
- W2024103248 cites W2083294512 @default.
- W2024103248 cites W2089843238 @default.
- W2024103248 cites W2091807727 @default.
- W2024103248 cites W2092739219 @default.
- W2024103248 cites W2094515157 @default.
- W2024103248 cites W2094755972 @default.
- W2024103248 cites W2120238222 @default.
- W2024103248 cites W2142392029 @default.
- W2024103248 cites W2157860544 @default.
- W2024103248 doi "https://doi.org/10.1088/0268-1242/23/4/045007" @default.
- W2024103248 hasPublicationYear "2008" @default.
- W2024103248 type Work @default.
- W2024103248 sameAs 2024103248 @default.
- W2024103248 citedByCount "7" @default.
- W2024103248 countsByYear W20241032482014 @default.
- W2024103248 countsByYear W20241032482015 @default.
- W2024103248 crossrefType "journal-article" @default.
- W2024103248 hasAuthorship W2024103248A5020171024 @default.
- W2024103248 hasAuthorship W2024103248A5026609783 @default.
- W2024103248 hasAuthorship W2024103248A5039155812 @default.
- W2024103248 hasAuthorship W2024103248A5050092732 @default.
- W2024103248 hasBestOaLocation W20241032482 @default.
- W2024103248 hasConcept C110738630 @default.
- W2024103248 hasConcept C113196181 @default.
- W2024103248 hasConcept C120665830 @default.
- W2024103248 hasConcept C121332964 @default.
- W2024103248 hasConcept C146088050 @default.
- W2024103248 hasConcept C147789679 @default.
- W2024103248 hasConcept C148898269 @default.
- W2024103248 hasConcept C153294291 @default.
- W2024103248 hasConcept C159985019 @default.
- W2024103248 hasConcept C171250308 @default.
- W2024103248 hasConcept C178790620 @default.
- W2024103248 hasConcept C185592680 @default.
- W2024103248 hasConcept C192562407 @default.
- W2024103248 hasConcept C194760766 @default.
- W2024103248 hasConcept C2779227376 @default.
- W2024103248 hasConcept C2780064504 @default.
- W2024103248 hasConcept C2780949179 @default.
- W2024103248 hasConcept C39353612 @default.
- W2024103248 hasConcept C43617362 @default.
- W2024103248 hasConcept C512968161 @default.
- W2024103248 hasConcept C513153333 @default.
- W2024103248 hasConcept C520434653 @default.
- W2024103248 hasConcept C62520636 @default.
- W2024103248 hasConcept C8739425 @default.
- W2024103248 hasConcept C95121573 @default.
- W2024103248 hasConceptScore W2024103248C110738630 @default.
- W2024103248 hasConceptScore W2024103248C113196181 @default.
- W2024103248 hasConceptScore W2024103248C120665830 @default.
- W2024103248 hasConceptScore W2024103248C121332964 @default.
- W2024103248 hasConceptScore W2024103248C146088050 @default.
- W2024103248 hasConceptScore W2024103248C147789679 @default.
- W2024103248 hasConceptScore W2024103248C148898269 @default.
- W2024103248 hasConceptScore W2024103248C153294291 @default.
- W2024103248 hasConceptScore W2024103248C159985019 @default.
- W2024103248 hasConceptScore W2024103248C171250308 @default.
- W2024103248 hasConceptScore W2024103248C178790620 @default.
- W2024103248 hasConceptScore W2024103248C185592680 @default.
- W2024103248 hasConceptScore W2024103248C192562407 @default.
- W2024103248 hasConceptScore W2024103248C194760766 @default.
- W2024103248 hasConceptScore W2024103248C2779227376 @default.
- W2024103248 hasConceptScore W2024103248C2780064504 @default.
- W2024103248 hasConceptScore W2024103248C2780949179 @default.
- W2024103248 hasConceptScore W2024103248C39353612 @default.
- W2024103248 hasConceptScore W2024103248C43617362 @default.
- W2024103248 hasConceptScore W2024103248C512968161 @default.
- W2024103248 hasConceptScore W2024103248C513153333 @default.
- W2024103248 hasConceptScore W2024103248C520434653 @default.
- W2024103248 hasConceptScore W2024103248C62520636 @default.
- W2024103248 hasConceptScore W2024103248C8739425 @default.
- W2024103248 hasConceptScore W2024103248C95121573 @default.
- W2024103248 hasIssue "4" @default.
- W2024103248 hasLocation W20241032481 @default.
- W2024103248 hasLocation W20241032482 @default.
- W2024103248 hasOpenAccess W2024103248 @default.