Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024151318> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2024151318 endingPage "256" @default.
- W2024151318 startingPage "251" @default.
- W2024151318 abstract "The electrical characteristics of Schottky diodes fabricated on silicon surfaces subject to low energy (10 keV) Ar+ implantation have been studied as a function of Ar+ ion dose. Significant changes in electrical characteristics are seen for ion doses as low as 5×1011 cm-2, well below the amorphization threshold dose for silicon. In conjunction with the ion energy threshold established earlier for silicon surface damage effects (about 25 eV), these results outline fundamental limits on the effect of ion-assisted dry etching processes on silicon surface barriers." @default.
- W2024151318 created "2016-06-24" @default.
- W2024151318 creator A5002001441 @default.
- W2024151318 creator A5057651898 @default.
- W2024151318 creator A5066841662 @default.
- W2024151318 creator A5073907637 @default.
- W2024151318 date "1985-04-01" @default.
- W2024151318 modified "2023-09-26" @default.
- W2024151318 title "Effect of low energy Ar+ ion implantation on silicon surface barriers" @default.
- W2024151318 cites W1998792994 @default.
- W2024151318 cites W1999944090 @default.
- W2024151318 cites W2001175061 @default.
- W2024151318 cites W2013678897 @default.
- W2024151318 cites W2028279809 @default.
- W2024151318 cites W2037445878 @default.
- W2024151318 cites W2072108632 @default.
- W2024151318 cites W2088266671 @default.
- W2024151318 cites W2102330417 @default.
- W2024151318 cites W2142406647 @default.
- W2024151318 doi "https://doi.org/10.1016/0040-6090(85)90318-9" @default.
- W2024151318 hasPublicationYear "1985" @default.
- W2024151318 type Work @default.
- W2024151318 sameAs 2024151318 @default.
- W2024151318 citedByCount "6" @default.
- W2024151318 crossrefType "journal-article" @default.
- W2024151318 hasAuthorship W2024151318A5002001441 @default.
- W2024151318 hasAuthorship W2024151318A5057651898 @default.
- W2024151318 hasAuthorship W2024151318A5066841662 @default.
- W2024151318 hasAuthorship W2024151318A5073907637 @default.
- W2024151318 hasConcept C100460472 @default.
- W2024151318 hasConcept C145148216 @default.
- W2024151318 hasConcept C171250308 @default.
- W2024151318 hasConcept C178790620 @default.
- W2024151318 hasConcept C185592680 @default.
- W2024151318 hasConcept C192562407 @default.
- W2024151318 hasConcept C205200001 @default.
- W2024151318 hasConcept C2779227376 @default.
- W2024151318 hasConcept C41823505 @default.
- W2024151318 hasConcept C49040817 @default.
- W2024151318 hasConcept C544956773 @default.
- W2024151318 hasConcept C78434282 @default.
- W2024151318 hasConceptScore W2024151318C100460472 @default.
- W2024151318 hasConceptScore W2024151318C145148216 @default.
- W2024151318 hasConceptScore W2024151318C171250308 @default.
- W2024151318 hasConceptScore W2024151318C178790620 @default.
- W2024151318 hasConceptScore W2024151318C185592680 @default.
- W2024151318 hasConceptScore W2024151318C192562407 @default.
- W2024151318 hasConceptScore W2024151318C205200001 @default.
- W2024151318 hasConceptScore W2024151318C2779227376 @default.
- W2024151318 hasConceptScore W2024151318C41823505 @default.
- W2024151318 hasConceptScore W2024151318C49040817 @default.
- W2024151318 hasConceptScore W2024151318C544956773 @default.
- W2024151318 hasConceptScore W2024151318C78434282 @default.
- W2024151318 hasIssue "3-4" @default.
- W2024151318 hasLocation W20241513181 @default.
- W2024151318 hasOpenAccess W2024151318 @default.
- W2024151318 hasPrimaryLocation W20241513181 @default.
- W2024151318 hasRelatedWork W1941419207 @default.
- W2024151318 hasRelatedWork W2033954390 @default.
- W2024151318 hasRelatedWork W2080659682 @default.
- W2024151318 hasRelatedWork W2096673206 @default.
- W2024151318 hasRelatedWork W2105054312 @default.
- W2024151318 hasRelatedWork W2116961508 @default.
- W2024151318 hasRelatedWork W2165898657 @default.
- W2024151318 hasRelatedWork W2495900880 @default.
- W2024151318 hasRelatedWork W3120723223 @default.
- W2024151318 hasRelatedWork W4297099598 @default.
- W2024151318 hasVolume "126" @default.
- W2024151318 isParatext "false" @default.
- W2024151318 isRetracted "false" @default.
- W2024151318 magId "2024151318" @default.
- W2024151318 workType "article" @default.