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• W2024152760 endingPage "928" @default.
• W2024152760 startingPage "925" @default.
• W2024152760 abstract "Tantalum oxide (Ta2O5) is widely used for MIM (Metal-Insulator-Metal) capacitor owing of its high dielectric constant. This work examines current–voltage and capacitance–voltage characteristics in the 5 K–300 K temperature range. Working at low temperature was chosen in order to freeze trapping mechanisms of the MIM capacitor. The curvature of C–V characteristics radically changes from 5 K to 300 K. The capacitance variation under voltage at 50 K and below can be investigated using the Langevin theory. From this model the permanent dipole moment and the number of dipoles have been extracted. From Poole–Frenkel identification curves, activation energy around 0.20 eV and a dielectric constant of 26 were found for positive polarisation. However, conduction mechanisms cannot be reduced to strick Poole–Frenkel modelling." @default.
• W2024152760 created "2016-06-24" @default.
• W2024152760 creator A5011270757 @default.
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• W2024152760 date "2005-05-01" @default.
• W2024152760 modified "2023-10-18" @default.
• W2024152760 title "Electrical properties in low temperature range (5K–300K) of Tantalum Oxide dielectric MIM capacitors" @default.
• W2024152760 cites W1642793491 @default.
• W2024152760 cites W1998104380 @default.
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• W2024152760 doi "https://doi.org/10.1016/j.microrel.2004.11.024" @default.
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