Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024155285> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2024155285 abstract "Electrical characteristics of high-κ∕Ge metal-oxide semiconductor (MOS) capacitors pretreated with HCl or HF solutions are investigated, including the effect of H2O2 incorporation. HCl treatment is more effective than HF treatment for decreasing equivalent oxide thickness. H2O2 incorporation into HCl solution leads to dramatic decrease in the capacitance at inversion side. We have confirmed that residual metal impurities are reduced below 1010atoms∕cm2 on the Ge surface after pretreatment with mixed solution of HCl and H2O2. We conclude that decrease in metal impurities at Ge surface is responsible for the superior C-V characteristic of Ge MOS capacitor." @default.
- W2024155285 created "2016-06-24" @default.
- W2024155285 creator A5014725714 @default.
- W2024155285 creator A5049861668 @default.
- W2024155285 creator A5050465783 @default.
- W2024155285 creator A5052909070 @default.
- W2024155285 date "2008-02-11" @default.
- W2024155285 modified "2023-10-17" @default.
- W2024155285 title "Improvement in C-V characteristics of Ge metal-oxide semiconductor capacitor by H2O2 incorporated HCl pretreatment" @default.
- W2024155285 cites W1978063668 @default.
- W2024155285 cites W1987287595 @default.
- W2024155285 cites W1997718513 @default.
- W2024155285 cites W1999758713 @default.
- W2024155285 cites W2002230146 @default.
- W2024155285 cites W2003449218 @default.
- W2024155285 cites W2005019773 @default.
- W2024155285 cites W2017062950 @default.
- W2024155285 cites W2022185271 @default.
- W2024155285 cites W2032634683 @default.
- W2024155285 cites W2081084976 @default.
- W2024155285 cites W2273886880 @default.
- W2024155285 doi "https://doi.org/10.1063/1.2857477" @default.
- W2024155285 hasPublicationYear "2008" @default.
- W2024155285 type Work @default.
- W2024155285 sameAs 2024155285 @default.
- W2024155285 citedByCount "11" @default.
- W2024155285 countsByYear W20241552852012 @default.
- W2024155285 countsByYear W20241552852014 @default.
- W2024155285 crossrefType "journal-article" @default.
- W2024155285 hasAuthorship W2024155285A5014725714 @default.
- W2024155285 hasAuthorship W2024155285A5049861668 @default.
- W2024155285 hasAuthorship W2024155285A5050465783 @default.
- W2024155285 hasAuthorship W2024155285A5052909070 @default.
- W2024155285 hasConcept C108225325 @default.
- W2024155285 hasConcept C113196181 @default.
- W2024155285 hasConcept C119599485 @default.
- W2024155285 hasConcept C127413603 @default.
- W2024155285 hasConcept C147789679 @default.
- W2024155285 hasConcept C165801399 @default.
- W2024155285 hasConcept C17525397 @default.
- W2024155285 hasConcept C178790620 @default.
- W2024155285 hasConcept C179104552 @default.
- W2024155285 hasConcept C185592680 @default.
- W2024155285 hasConcept C191897082 @default.
- W2024155285 hasConcept C192562407 @default.
- W2024155285 hasConcept C2779851234 @default.
- W2024155285 hasConcept C30066665 @default.
- W2024155285 hasConcept C43617362 @default.
- W2024155285 hasConcept C49040817 @default.
- W2024155285 hasConcept C52192207 @default.
- W2024155285 hasConcept C544153396 @default.
- W2024155285 hasConcept C544956773 @default.
- W2024155285 hasConcept C550623735 @default.
- W2024155285 hasConcept C71987851 @default.
- W2024155285 hasConceptScore W2024155285C108225325 @default.
- W2024155285 hasConceptScore W2024155285C113196181 @default.
- W2024155285 hasConceptScore W2024155285C119599485 @default.
- W2024155285 hasConceptScore W2024155285C127413603 @default.
- W2024155285 hasConceptScore W2024155285C147789679 @default.
- W2024155285 hasConceptScore W2024155285C165801399 @default.
- W2024155285 hasConceptScore W2024155285C17525397 @default.
- W2024155285 hasConceptScore W2024155285C178790620 @default.
- W2024155285 hasConceptScore W2024155285C179104552 @default.
- W2024155285 hasConceptScore W2024155285C185592680 @default.
- W2024155285 hasConceptScore W2024155285C191897082 @default.
- W2024155285 hasConceptScore W2024155285C192562407 @default.
- W2024155285 hasConceptScore W2024155285C2779851234 @default.
- W2024155285 hasConceptScore W2024155285C30066665 @default.
- W2024155285 hasConceptScore W2024155285C43617362 @default.
- W2024155285 hasConceptScore W2024155285C49040817 @default.
- W2024155285 hasConceptScore W2024155285C52192207 @default.
- W2024155285 hasConceptScore W2024155285C544153396 @default.
- W2024155285 hasConceptScore W2024155285C544956773 @default.
- W2024155285 hasConceptScore W2024155285C550623735 @default.
- W2024155285 hasConceptScore W2024155285C71987851 @default.
- W2024155285 hasIssue "6" @default.
- W2024155285 hasLocation W20241552851 @default.
- W2024155285 hasOpenAccess W2024155285 @default.
- W2024155285 hasPrimaryLocation W20241552851 @default.
- W2024155285 hasRelatedWork W1979829726 @default.
- W2024155285 hasRelatedWork W1991958344 @default.
- W2024155285 hasRelatedWork W2026151728 @default.
- W2024155285 hasRelatedWork W2083199478 @default.
- W2024155285 hasRelatedWork W2103217035 @default.
- W2024155285 hasRelatedWork W2129594288 @default.
- W2024155285 hasRelatedWork W2527459387 @default.
- W2024155285 hasRelatedWork W2966586686 @default.
- W2024155285 hasRelatedWork W4253731651 @default.
- W2024155285 hasRelatedWork W632547833 @default.
- W2024155285 hasVolume "92" @default.
- W2024155285 isParatext "false" @default.
- W2024155285 isRetracted "false" @default.
- W2024155285 magId "2024155285" @default.
- W2024155285 workType "article" @default.