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- W2024157039 abstract "The highest mobility InSb epilayer grown to date by organometallic vapor phase epitaxy has been achieved by utilizing high-purity organometallic sources, choosing a reactor geometry to reproducibly control the source concentrations above the substrate, and using a high- integrity reactor system. On a p-type InSb substrate, an unintentionally doped layer had a 77 K n-type carrier concentration and mobility of 1.4×1015 cm−3 and 2.53×105 cm2/V s. Growths on GaAs substrates were greatly affected by the lattice mismatch and had 77 K carrier concentrations similar to the InSb case but with mobilities of (5.0–9.0)×104 cm2/V s. The crystal quality, morphology, and cyclotron resonance characteristics are reported and found to be comparable to state-of-the-art molecular beam epitaxy layers." @default.
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- W2024157039 date "1991-04-29" @default.
- W2024157039 modified "2023-09-27" @default.
- W2024157039 title "High‐mobility InSb grown by organometallic vapor phase epitaxy" @default.
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- W2024157039 doi "https://doi.org/10.1063/1.105069" @default.
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