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• W2024166427 abstract "This paper presents studies of medium range order (MRO) of a-Si:H by small-angle X-ray scattering (SAXS) measurements. Device-quality a-Si:H films prepared by different preparation methods show differences in thermal evolution characteristics of hydrogen and scaling features in SAXS spectra. This suggests that a-Si:H can have several kinds of microstructures, and can therefore be classified by MRO." @default.
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• W2024166427 date "1991-12-01" @default.
• W2024166427 modified "2023-09-24" @default.
• W2024166427 title "Classification of Inhomogeneities in Hydrogenated Amorphous Silicon" @default.
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• W2024166427 doi "https://doi.org/10.1143/jjap.30.l2006" @default.
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