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- W2024181852 abstract "Real time monitoring of the growth of plasma deposited transparent thin films by spectroscopic phase modulated ellipsometry (SPME) is presented. Two on-line methods of determination of the refractive index n and the film thickness d are evaluated. The first one is based on the fast inversion of the Fresnel equations (0.2 s with a conventional PC 486 computer). Combining the measurements simultaneously recorded at two photon energies, a 5% relative precision is obtained on 5–6000 Å thick films even deposited at high deposition rate (32 Å s−1). On the other hand, a better precision can be obtained using a least squares fit procedure based on single photon energy SPME measurements. In the latter case, it is shown that the product nd can be determined with a 1% precision, up to 6000 Å." @default.
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- W2024181852 date "1995-08-14" @default.
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- W2024181852 title "Real time monitoring of the growth of transparent thin films by spectroscopic ellipsometry" @default.
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- W2024181852 doi "https://doi.org/10.1063/1.114694" @default.
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