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• W2024189382 endingPage "445" @default.
• W2024189382 startingPage "440" @default.
• W2024189382 abstract "CaZrO3 thin film is a promising candidate for gate applications due to its high dielectric constant. Thin films of perovskite CaZrO3 were prepared on Pt/Ti/SiO2/Si substrates by the spin coating and post-annealing was carried out at different temperatures from 550°C to 700°C in flowing oxygen atmosphere. Calcium acetate and zirconium butoxide were chosen as precursors, separately and thoroughly dissolved in glacial acetic acid CH3COOH. Based on our best knowledge, it is the first time in the literature to systemically study the properties of CaZrO3 thin films. Those prepared thin films were investigated by using X-ray diffraction (XRD), Flourier transform infrared (FT-IR) spectroscopy and scanning electron microscopy (SEM) to study the mechanisms of phase transformation and crystallinity. The results show that the film annealed at 550°C is amorphous with existing of carbonates, while the carbonates and other organics are decomposed at 600°C and above and the film is crystallized into perovskite phase with increasing annealing temperatures. The leakage current density of the CaZrO3 thin film annealed at 650°C for 1 h is approximately 9.5×10−8 A/cm2 at high applied electrical field 2.6 MV/cm. Measured dielectric properties show that those CaZrO3 films have their dielectric constant near 20 and exhibit stable dielectric properties nearly independent on the applied electrical field and frequency at room temperature." @default.
• W2024189382 created "2016-06-24" @default.
• W2024189382 creator A5029282214 @default.
• W2024189382 creator A5043641505 @default.
• W2024189382 creator A5054462478 @default.
• W2024189382 creator A5061202307 @default.
• W2024189382 creator A5081576427 @default.
• W2024189382 date "2004-05-01" @default.
• W2024189382 modified "2023-09-28" @default.
• W2024189382 title "Preparation and characterization of sol–gel derived CaZrO3 dielectric thin films for high-k applications" @default.
• W2024189382 cites W1539098129 @default.
• W2024189382 cites W1963705165 @default.
• W2024189382 cites W1967417341 @default.
• W2024189382 cites W1991636336 @default.
• W2024189382 cites W1992343392 @default.
• W2024189382 cites W2008449124 @default.
• W2024189382 cites W2012696785 @default.
• W2024189382 cites W2025842764 @default.
• W2024189382 cites W2027521012 @default.
• W2024189382 cites W2028907569 @default.
• W2024189382 cites W2065548045 @default.
• W2024189382 cites W2069903680 @default.
• W2024189382 cites W2075807111 @default.
• W2024189382 cites W2140504112 @default.
• W2024189382 cites W2327612587 @default.
• W2024189382 doi "https://doi.org/10.1016/j.physb.2004.01.147" @default.
• W2024189382 hasPublicationYear "2004" @default.
• W2024189382 type Work @default.
• W2024189382 sameAs 2024189382 @default.
• W2024189382 citedByCount "21" @default.
• W2024189382 countsByYear W20241893822012 @default.
• W2024189382 countsByYear W20241893822014 @default.
• W2024189382 countsByYear W20241893822015 @default.
• W2024189382 countsByYear W20241893822016 @default.
• W2024189382 countsByYear W20241893822019 @default.
• W2024189382 countsByYear W20241893822020 @default.
• W2024189382 countsByYear W20241893822021 @default.
• W2024189382 countsByYear W20241893822022 @default.
• W2024189382 crossrefType "journal-article" @default.
• W2024189382 hasAuthorship W2024189382A5029282214 @default.
• W2024189382 hasAuthorship W2024189382A5043641505 @default.
• W2024189382 hasAuthorship W2024189382A5054462478 @default.
• W2024189382 hasAuthorship W2024189382A5061202307 @default.
• W2024189382 hasAuthorship W2024189382A5081576427 @default.
• W2024189382 hasConcept C113196181 @default.
• W2024189382 hasConcept C115196108 @default.
• W2024189382 hasConcept C127413603 @default.
• W2024189382 hasConcept C133386390 @default.
• W2024189382 hasConcept C159985019 @default.
• W2024189382 hasConcept C16317505 @default.
• W2024189382 hasConcept C171250308 @default.
• W2024189382 hasConcept C178790620 @default.
• W2024189382 hasConcept C185592680 @default.
• W2024189382 hasConcept C19067145 @default.
• W2024189382 hasConcept C192562407 @default.
• W2024189382 hasConcept C26771246 @default.
• W2024189382 hasConcept C2777855556 @default.
• W2024189382 hasConcept C38398224 @default.
• W2024189382 hasConcept C42360764 @default.
• W2024189382 hasConcept C46275449 @default.
• W2024189382 hasConcept C49040817 @default.
• W2024189382 hasConcept C56052488 @default.
• W2024189382 hasConcept C8010536 @default.
• W2024189382 hasConceptScore W2024189382C113196181 @default.
• W2024189382 hasConceptScore W2024189382C115196108 @default.
• W2024189382 hasConceptScore W2024189382C127413603 @default.
• W2024189382 hasConceptScore W2024189382C133386390 @default.
• W2024189382 hasConceptScore W2024189382C159985019 @default.
• W2024189382 hasConceptScore W2024189382C16317505 @default.
• W2024189382 hasConceptScore W2024189382C171250308 @default.
• W2024189382 hasConceptScore W2024189382C178790620 @default.
• W2024189382 hasConceptScore W2024189382C185592680 @default.
• W2024189382 hasConceptScore W2024189382C19067145 @default.
• W2024189382 hasConceptScore W2024189382C192562407 @default.
• W2024189382 hasConceptScore W2024189382C26771246 @default.
• W2024189382 hasConceptScore W2024189382C2777855556 @default.
• W2024189382 hasConceptScore W2024189382C38398224 @default.
• W2024189382 hasConceptScore W2024189382C42360764 @default.
• W2024189382 hasConceptScore W2024189382C46275449 @default.
• W2024189382 hasConceptScore W2024189382C49040817 @default.
• W2024189382 hasConceptScore W2024189382C56052488 @default.
• W2024189382 hasConceptScore W2024189382C8010536 @default.
• W2024189382 hasIssue "1-4" @default.
• W2024189382 hasLocation W20241893821 @default.
• W2024189382 hasOpenAccess W2024189382 @default.
• W2024189382 hasPrimaryLocation W20241893821 @default.
• W2024189382 hasRelatedWork W1631185855 @default.
• W2024189382 hasRelatedWork W2038414487 @default.
• W2024189382 hasRelatedWork W2039664639 @default.
• W2024189382 hasRelatedWork W2063802042 @default.
• W2024189382 hasRelatedWork W2067010770 @default.
• W2024189382 hasRelatedWork W2383217154 @default.
• W2024189382 hasRelatedWork W2393441669 @default.
• W2024189382 hasRelatedWork W2797298981 @default.
• W2024189382 hasRelatedWork W3134193275 @default.
• W2024189382 hasRelatedWork W3181169082 @default.
• W2024189382 hasVolume "348" @default.
• W2024189382 isParatext "false" @default.

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