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- W2024199595 abstract "There is considerable interest in the development of low-cost, low-power resistive sensors for possible application in hand-held gas monitors. In this paper we describe the fabrication of a high-temperature, resistive sensor using silicon microtechnology which lies on a sub-micron thick membrane with an embedded platinum resistance heater. A thermal model of this micro-hotplate is constructed and compared with its observed behaviour. The microsensor can be operated at temperatures of up to 600°C and has a low d.c. power consumption per sensor of 40 mW at 300°C. As the thermal time-constant of the microsensor is only about 5 ms, its average power consumption can be reduced by a factor of at least ten through an a.c. mode of operation, thus making a single device or even an array device suitable for battery-powered instruments." @default.
- W2024199595 created "2016-06-24" @default.
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- W2024199595 date "1997-11-01" @default.
- W2024199595 modified "2023-10-16" @default.
- W2024199595 title "Thermal modelling and characterisation of micropower chemoresistive silicon sensors" @default.
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- W2024199595 doi "https://doi.org/10.1016/s0925-4005(97)00261-x" @default.
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