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- W2024200023 abstract "The relative proportion of substitutional Sb, precipitates of metallic antimony and vacancy complexes has been estimated in highly implanted dopant Si samples (2 and 5 × 1016 ions/cm2) annealed at 900°C. The most striking results is the strong Sb out-diffusion for Sb-only implanted specimens even for a short annealing time. On the contrary, Sb diffusivity is strongly decreased in the case of Sb/B co-implantation." @default.
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- W2024200023 date "1995-03-01" @default.
- W2024200023 modified "2023-09-30" @default.
- W2024200023 title "High temperature annealings of Sb and Sb/B heavily implanted silicon wafers studied by near grazing incidence fluorescence EXAFS" @default.
- W2024200023 cites W2013730897 @default.
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- W2024200023 doi "https://doi.org/10.1016/0921-4526(94)00729-f" @default.
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