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• W2024222296 abstract "Nano-electro-mechanical resonators used for sensing, data storage, and nano-fabrication applications are often operated as feed-back control systems. To determine the transfer function of silicon cantilevers with a width of 5.0 mum, a thickness of 800 nm, and lengths of 10, 15, 30, and 45 mum, the damping in air and liquid was simulated numerically using an integrated fluid- structure solver. Bode diagrams and Nyquist plots of the cantilever transfer function indicate that the resonator will behave as a heavily damped system in liquid, and a lightly damped system in air. After experimental validation, this computational method is expected to allow prediction of frequency response prior to fabrication of NEMS resonators." @default.
• W2024222296 created "2016-06-24" @default.
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• W2024222296 date "2008-08-01" @default.
• W2024222296 modified "2023-09-25" @default.
• W2024222296 title "Frequency Response of Nanoelectromechanical Cantilevers Operating in Fluid" @default.
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• W2024222296 doi "https://doi.org/10.1109/nano.2008.97" @default.
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