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- W2024225942 abstract "Using arsine and triethylgallium with flow modulation, organometallic vapor phase epitaxy can produce high purity GaAs layers with V/III molar ratios near unity. We have estimated that under appropriate growth conditions the arsine incorporation efficiency into epitaxial GaAs can exceed 30%. The arsine flow requirement for obtaining good morphology has been identified over a range of substrate temperatures using adduct-grade triethylgallium. The process described reduces the environmental impact and life safety risk of the hydride based organometallic vapor phase epitaxial method." @default.
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- W2024225942 date "1992-10-26" @default.
- W2024225942 modified "2023-10-05" @default.
- W2024225942 title "Arsine flow requirement for the flow modulation growth of high purity GaAs using adduct-grade triethylgallium" @default.
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- W2024225942 doi "https://doi.org/10.1063/1.108330" @default.
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