FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024251160> ?p ?o ?g. }

• W2024251160 abstract "Strain distributions within the active layer of a silicon-on-insulator substrate induced by through-silicon via (TSV) structures were mapped using x-ray microbeam diffraction. The interaction region of the out-of-plane strain, ε33, from a TSV feature containing copper metallization extended approximately 6 μm from the TSV outer edge for circular and annular geometries. Measurements conducted on identical TSV structures without copper reveal that strain fields generated by the liner materials extend a similar distance and with comparable magnitude as those with copper. FEM-based simulations show the total interaction region induced by the TSV can extend farther than that of ε33." @default.
• W2024251160 created "2016-06-24" @default.
• W2024251160 creator A5050343682 @default.
• W2024251160 creator A5063397492 @default.
• W2024251160 creator A5083017466 @default.
• W2024251160 creator A5086680692 @default.
• W2024251160 date "2013-06-24" @default.
• W2024251160 modified "2023-09-25" @default.
• W2024251160 title "Submicron mapping of strain distributions induced by three-dimensional through-silicon via features" @default.
• W2024251160 cites W1965514345 @default.
• W2024251160 cites W1969486543 @default.
• W2024251160 cites W1989578669 @default.
• W2024251160 cites W1991855258 @default.
• W2024251160 cites W1991922379 @default.
• W2024251160 cites W1993610597 @default.
• W2024251160 cites W2002257666 @default.
• W2024251160 cites W2009195513 @default.
• W2024251160 cites W2022006186 @default.
• W2024251160 cites W2043890437 @default.
• W2024251160 cites W2047775625 @default.
• W2024251160 cites W2065414339 @default.
• W2024251160 cites W2067983335 @default.
• W2024251160 cites W2079481265 @default.
• W2024251160 cites W2107868198 @default.
• W2024251160 cites W2124340473 @default.
• W2024251160 cites W2128259088 @default.
• W2024251160 cites W2133543885 @default.
• W2024251160 cites W2137900832 @default.
• W2024251160 cites W2160123489 @default.
• W2024251160 cites W2319797431 @default.
• W2024251160 doi "https://doi.org/10.1063/1.4812481" @default.
• W2024251160 hasPublicationYear "2013" @default.
• W2024251160 type Work @default.
• W2024251160 sameAs 2024251160 @default.
• W2024251160 citedByCount "15" @default.
• W2024251160 countsByYear W20242511602014 @default.
• W2024251160 countsByYear W20242511602015 @default.
• W2024251160 countsByYear W20242511602016 @default.
• W2024251160 countsByYear W20242511602017 @default.
• W2024251160 countsByYear W20242511602018 @default.
• W2024251160 countsByYear W20242511602020 @default.
• W2024251160 crossrefType "journal-article" @default.
• W2024251160 hasAuthorship W2024251160A5050343682 @default.
• W2024251160 hasAuthorship W2024251160A5063397492 @default.
• W2024251160 hasAuthorship W2024251160A5083017466 @default.
• W2024251160 hasAuthorship W2024251160A5086680692 @default.
• W2024251160 hasConcept C111368507 @default.
• W2024251160 hasConcept C120665830 @default.
• W2024251160 hasConcept C121332964 @default.
• W2024251160 hasConcept C126322002 @default.
• W2024251160 hasConcept C127313418 @default.
• W2024251160 hasConcept C127413603 @default.
• W2024251160 hasConcept C135628077 @default.
• W2024251160 hasConcept C159985019 @default.
• W2024251160 hasConcept C185592680 @default.
• W2024251160 hasConcept C191897082 @default.
• W2024251160 hasConcept C192562407 @default.
• W2024251160 hasConcept C2777152588 @default.
• W2024251160 hasConcept C2777289219 @default.
• W2024251160 hasConcept C2778022156 @default.
• W2024251160 hasConcept C2779227376 @default.
• W2024251160 hasConcept C45632049 @default.
• W2024251160 hasConcept C49040817 @default.
• W2024251160 hasConcept C53143962 @default.
• W2024251160 hasConcept C544778455 @default.
• W2024251160 hasConcept C544956773 @default.
• W2024251160 hasConcept C66938386 @default.
• W2024251160 hasConcept C71924100 @default.
• W2024251160 hasConcept C8010536 @default.
• W2024251160 hasConceptScore W2024251160C111368507 @default.
• W2024251160 hasConceptScore W2024251160C120665830 @default.
• W2024251160 hasConceptScore W2024251160C121332964 @default.
• W2024251160 hasConceptScore W2024251160C126322002 @default.
• W2024251160 hasConceptScore W2024251160C127313418 @default.
• W2024251160 hasConceptScore W2024251160C127413603 @default.
• W2024251160 hasConceptScore W2024251160C135628077 @default.
• W2024251160 hasConceptScore W2024251160C159985019 @default.
• W2024251160 hasConceptScore W2024251160C185592680 @default.
• W2024251160 hasConceptScore W2024251160C191897082 @default.
• W2024251160 hasConceptScore W2024251160C192562407 @default.
• W2024251160 hasConceptScore W2024251160C2777152588 @default.
• W2024251160 hasConceptScore W2024251160C2777289219 @default.
• W2024251160 hasConceptScore W2024251160C2778022156 @default.
• W2024251160 hasConceptScore W2024251160C2779227376 @default.
• W2024251160 hasConceptScore W2024251160C45632049 @default.
• W2024251160 hasConceptScore W2024251160C49040817 @default.
• W2024251160 hasConceptScore W2024251160C53143962 @default.
• W2024251160 hasConceptScore W2024251160C544778455 @default.
• W2024251160 hasConceptScore W2024251160C544956773 @default.
• W2024251160 hasConceptScore W2024251160C66938386 @default.
• W2024251160 hasConceptScore W2024251160C71924100 @default.
• W2024251160 hasConceptScore W2024251160C8010536 @default.
• W2024251160 hasIssue "25" @default.
• W2024251160 hasLocation W20242511601 @default.
• W2024251160 hasOpenAccess W2024251160 @default.
• W2024251160 hasPrimaryLocation W20242511601 @default.
• W2024251160 hasRelatedWork W1873547521 @default.
• W2024251160 hasRelatedWork W1997998638 @default.
• W2024251160 hasRelatedWork W2051362955 @default.
• W2024251160 hasRelatedWork W2165653175 @default.

• next