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- W2024256765 abstract "This letter presents an ultrathin textured polycrystalline oxide (polyoxide) (≤100 Å) prepared by thermal oxidation of thin polycrystalline silicon (polysilicon) film on n+ polysilicon. The presented textured polyoxide exhibits a much higher electron injection efficiency, a much smaller electron trapping rate, and a much larger charge to breakdown than the normal polyoxide. The value of Qbd of the textured polyoxide could be more than 3000 C/cm2 even under 100 mA/cm2 stressing." @default.
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- W2024256765 date "1993-06-28" @default.
- W2024256765 modified "2023-10-18" @default.
- W2024256765 title "Ultrathin textured polycrystalline oxide with a high electron conduction efficiency prepared by thermal oxidation of thin polycrystalline silicon film onn+polycrystalline silicon" @default.
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- W2024256765 doi "https://doi.org/10.1063/1.109004" @default.
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