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• W2024263182 startingPage "2971" @default.
• W2024263182 abstract "The effect of nitrogen addition on the structure and nanomechanical properties of tetrahedral amorphous carbon, tα-C, has been studied. The tα-C films were grown on Al2O3-TiC substrates by reactive pulsed KrF excimer laser ablation of graphite targets at a laser fluence of 10 J cm-2. Nitrogen contents up to 19 at.% were obtained by increasing the nitrogen partial pressure, PN2, to 75 mTorr. The sp3 content in the tα-C film as determined by analysis of the XPS C 1s core level spectra had a value of about 76%. Incorporation of a small amount of nitrogen, 2 at.%, reduces the clustering of the sp2 phase and improves the nanomechanical properties of the tα-C films, whilst for higher nitrogen concentrations the carbon bonding changes progressively from sp3 to sp2. Quantitative analysis of the Raman spectra indicated that incorporation of nitrogen greater than 2 at.% induced a progressive long-range order in the amorphous carbon and an increase in the size of sp2 graphitic clusters. Additionally, Raman spectroscopy established the presence of C≡N bonds at high PN2. To elucidate the influence of the substrate on the measurement of the nanomechanical properties of thin film a continuous measure of hardness and modulus as a function of depth was performed. Both the hardness and Young's modulus were significantly reduced from 56 and 573 GPa for CN0.02 to 2 and 44 GPa for CN0.19 at a contact depth of 25 nm. The deterioration of the nanomechanical properties with N incorporation is consistent with the spectroscopic results, which indicate a structural transformation from an amorphous structure consisting predominately of sp3 C bonds to an sp2 graphitic-like phase." @default.
• W2024263182 created "2016-06-24" @default.
• W2024263182 creator A5055763793 @default.
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• W2024263182 date "2001-03-15" @default.
• W2024263182 modified "2023-09-27" @default.
• W2024263182 title "Influence of nitrogen on the structure and nanomechanical properties of pulsed laser deposited tetrahedral amorphous carbon" @default.
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• W2024263182 doi "https://doi.org/10.1088/0953-8984/13/13/311" @default.
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