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- W2024274772 abstract "Ultra-small butt-joint germanium photodetector featuring self-aligned in-situ doping was realized with drastically decreased process number based on novel CVD method. The photodetector showed prominently increased 3 dB bandwidth at zero bias (35 GHz)." @default.
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- W2024274772 date "2014-01-01" @default.
- W2024274772 modified "2023-09-25" @default.
- W2024274772 title "Ultra-Small Butt-Joint Ge Photodetector Featuring Self-Aligned In-situ Doping and CMP-Free Novel CVD Process" @default.
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- W2024274772 doi "https://doi.org/10.1364/ofc.2014.m2g.5" @default.
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