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- W2024282146 abstract "A new deposition technique that builds on the thermal particle characteristics typical for e-beam deposition is described. This technique applies magnetron sputtering in a special scheme where these characteristics of the e-beam deposition method are achieved. The method was used for interface engineering of Mo/Si multilayers, with different barrier layer materials being tested. Composition of the barrier layers formed was studied using XPS. Results are shown on the general example of a Mo/B<sub>4</sub>C/Si/B<sub>4</sub>C system. The ultra-thin reflectance enhancement B<sub>4</sub>C barriers can be deposited with low added stress, resulting in a multilayer stress as low as about -150 MPa. The best interface engineered multilayers reflect 70.5% at 13.3 nm and 70.15% at 13.5 nm. These results were achieved with 50 period multilayers terminated with a standard Si layer." @default.
- W2024282146 created "2016-06-24" @default.
- W2024282146 creator A5011891347 @default.
- W2024282146 creator A5013423421 @default.
- W2024282146 creator A5018553971 @default.
- W2024282146 creator A5025185970 @default.
- W2024282146 creator A5028394646 @default.
- W2024282146 creator A5045901189 @default.
- W2024282146 creator A5063710716 @default.
- W2024282146 creator A5087582416 @default.
- W2024282146 date "2007-03-16" @default.
- W2024282146 modified "2023-10-16" @default.
- W2024282146 title "Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition" @default.
- W2024282146 doi "https://doi.org/10.1117/12.711796" @default.
- W2024282146 hasPublicationYear "2007" @default.
- W2024282146 type Work @default.
- W2024282146 sameAs 2024282146 @default.
- W2024282146 citedByCount "21" @default.
- W2024282146 countsByYear W20242821462012 @default.
- W2024282146 countsByYear W20242821462013 @default.
- W2024282146 countsByYear W20242821462017 @default.
- W2024282146 countsByYear W20242821462018 @default.
- W2024282146 countsByYear W20242821462019 @default.
- W2024282146 countsByYear W20242821462020 @default.
- W2024282146 countsByYear W20242821462021 @default.
- W2024282146 countsByYear W20242821462022 @default.
- W2024282146 crossrefType "proceedings-article" @default.
- W2024282146 hasAuthorship W2024282146A5011891347 @default.
- W2024282146 hasAuthorship W2024282146A5013423421 @default.
- W2024282146 hasAuthorship W2024282146A5018553971 @default.
- W2024282146 hasAuthorship W2024282146A5025185970 @default.
- W2024282146 hasAuthorship W2024282146A5028394646 @default.
- W2024282146 hasAuthorship W2024282146A5045901189 @default.
- W2024282146 hasAuthorship W2024282146A5063710716 @default.
- W2024282146 hasAuthorship W2024282146A5087582416 @default.
- W2024282146 hasConcept C113196181 @default.
- W2024282146 hasConcept C127413603 @default.
- W2024282146 hasConcept C138885662 @default.
- W2024282146 hasConcept C151730666 @default.
- W2024282146 hasConcept C171250308 @default.
- W2024282146 hasConcept C175708663 @default.
- W2024282146 hasConcept C185592680 @default.
- W2024282146 hasConcept C19067145 @default.
- W2024282146 hasConcept C192562407 @default.
- W2024282146 hasConcept C21036866 @default.
- W2024282146 hasConcept C22423302 @default.
- W2024282146 hasConcept C2779227376 @default.
- W2024282146 hasConcept C2816523 @default.
- W2024282146 hasConcept C41895202 @default.
- W2024282146 hasConcept C42360764 @default.
- W2024282146 hasConcept C43617362 @default.
- W2024282146 hasConcept C49040817 @default.
- W2024282146 hasConcept C544956773 @default.
- W2024282146 hasConcept C55148256 @default.
- W2024282146 hasConcept C61427134 @default.
- W2024282146 hasConcept C64297162 @default.
- W2024282146 hasConcept C69544855 @default.
- W2024282146 hasConcept C86803240 @default.
- W2024282146 hasConceptScore W2024282146C113196181 @default.
- W2024282146 hasConceptScore W2024282146C127413603 @default.
- W2024282146 hasConceptScore W2024282146C138885662 @default.
- W2024282146 hasConceptScore W2024282146C151730666 @default.
- W2024282146 hasConceptScore W2024282146C171250308 @default.
- W2024282146 hasConceptScore W2024282146C175708663 @default.
- W2024282146 hasConceptScore W2024282146C185592680 @default.
- W2024282146 hasConceptScore W2024282146C19067145 @default.
- W2024282146 hasConceptScore W2024282146C192562407 @default.
- W2024282146 hasConceptScore W2024282146C21036866 @default.
- W2024282146 hasConceptScore W2024282146C22423302 @default.
- W2024282146 hasConceptScore W2024282146C2779227376 @default.
- W2024282146 hasConceptScore W2024282146C2816523 @default.
- W2024282146 hasConceptScore W2024282146C41895202 @default.
- W2024282146 hasConceptScore W2024282146C42360764 @default.
- W2024282146 hasConceptScore W2024282146C43617362 @default.
- W2024282146 hasConceptScore W2024282146C49040817 @default.
- W2024282146 hasConceptScore W2024282146C544956773 @default.
- W2024282146 hasConceptScore W2024282146C55148256 @default.
- W2024282146 hasConceptScore W2024282146C61427134 @default.
- W2024282146 hasConceptScore W2024282146C64297162 @default.
- W2024282146 hasConceptScore W2024282146C69544855 @default.
- W2024282146 hasConceptScore W2024282146C86803240 @default.
- W2024282146 hasLocation W20242821461 @default.
- W2024282146 hasOpenAccess W2024282146 @default.
- W2024282146 hasPrimaryLocation W20242821461 @default.
- W2024282146 hasRelatedWork W1977717576 @default.
- W2024282146 hasRelatedWork W1990835183 @default.
- W2024282146 hasRelatedWork W2050744320 @default.
- W2024282146 hasRelatedWork W2132411709 @default.
- W2024282146 hasRelatedWork W2316948141 @default.
- W2024282146 hasRelatedWork W2334467092 @default.
- W2024282146 hasRelatedWork W2350109348 @default.
- W2024282146 hasRelatedWork W2379691627 @default.
- W2024282146 hasRelatedWork W2929003104 @default.
- W2024282146 hasRelatedWork W3192532003 @default.
- W2024282146 isParatext "false" @default.
- W2024282146 isRetracted "false" @default.
- W2024282146 magId "2024282146" @default.
- W2024282146 workType "article" @default.