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- W2024331567 abstract "The inductively coupled plasma (ICP) gaseous electronics conference (GEC) reference cell provides a standard system for the study of plasma sciences. In this article, we present a version of the ICP GEC cell that has been designed to allow studies of the interactions between a plasma, gas-phase chemistry, and surface-phase chemistry. Specifically, this modified GEC reference cell has specially designed interior walls that can be heated/cooled (10 to 200 °C) and moved. In addition, these walls can be coated with various materials (Al2O3, SiO2, Si, etc.). Design specifications and initial results are presented. These initial results provide an indication of the flexibility of this modified tool and the types of experiments that it should allow." @default.
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- W2024331567 date "2004-04-01" @default.
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- W2024331567 title "Modified gaseous electronics conference reference cell for the study of plasma-surface-gas interactions" @default.
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- W2024331567 doi "https://doi.org/10.1063/1.1688443" @default.
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