Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024348229> ?p ?o ?g. }
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- W2024348229 endingPage "931" @default.
- W2024348229 startingPage "918" @default.
- W2024348229 abstract "The deflection of a bilayered cantilever due to an external stimulus can be utilized in novel microsensors and actuators. It can also be used to determine the material properties of the components. Existing models are limited to investigations of individual systems such as isotropic (thermal, piezoelectric etc) or anisotropic (magnetostrictive) driving stimuli. A unified theory is presented based on total energy minimization, allowing inclusion of all stimuli acting on the system. Current theory, including that of a magnetostrictive cantilever, also tends to be related to a negligible film-to-substrate thickness ratio. This analysis allows examination of all thickness ratios, is in agreement with finite-element analysis, and also reduces to the thin-film limit. This is of increasing importance with the current drive to make micro devices. The data are examined for both sensor and actuator application. This is presented in a novel form, particularly for actuators. It is assumed that a cantilever actuator should deliver a given force at specific displacement. The full analysis of such systems allows, for the first time, quantitative optimization of device performance based on material properties and dimensions. The limitations on cantilever geometry given by thermal noise are derived. This analysis shows that substantial improvements in micromechanical sensor technology are still possible." @default.
- W2024348229 created "2016-06-24" @default.
- W2024348229 creator A5013099742 @default.
- W2024348229 creator A5015959543 @default.
- W2024348229 creator A5031365945 @default.
- W2024348229 creator A5056459599 @default.
- W2024348229 creator A5065319455 @default.
- W2024348229 date "2000-11-29" @default.
- W2024348229 modified "2023-09-23" @default.
- W2024348229 title "Cantilever unified theory and optimization for sensors and actuators" @default.
- W2024348229 cites W1979398413 @default.
- W2024348229 cites W1982757954 @default.
- W2024348229 cites W1986358389 @default.
- W2024348229 cites W1990400720 @default.
- W2024348229 cites W1990767932 @default.
- W2024348229 cites W1995991877 @default.
- W2024348229 cites W1996341156 @default.
- W2024348229 cites W1999184785 @default.
- W2024348229 cites W2012241126 @default.
- W2024348229 cites W2018477413 @default.
- W2024348229 cites W2021892363 @default.
- W2024348229 cites W2031698620 @default.
- W2024348229 cites W2031918078 @default.
- W2024348229 cites W2039487385 @default.
- W2024348229 cites W2045048324 @default.
- W2024348229 cites W2052513028 @default.
- W2024348229 cites W2065644627 @default.
- W2024348229 cites W2068360671 @default.
- W2024348229 cites W2069200279 @default.
- W2024348229 cites W2073258562 @default.
- W2024348229 cites W2078460041 @default.
- W2024348229 cites W2097511512 @default.
- W2024348229 cites W2129594686 @default.
- W2024348229 cites W2145301831 @default.
- W2024348229 cites W2158666240 @default.
- W2024348229 cites W2163034082 @default.
- W2024348229 doi "https://doi.org/10.1088/0964-1726/9/6/324" @default.
- W2024348229 hasPublicationYear "2000" @default.
- W2024348229 type Work @default.
- W2024348229 sameAs 2024348229 @default.
- W2024348229 citedByCount "36" @default.
- W2024348229 countsByYear W20243482292012 @default.
- W2024348229 countsByYear W20243482292013 @default.
- W2024348229 countsByYear W20243482292014 @default.
- W2024348229 countsByYear W20243482292015 @default.
- W2024348229 countsByYear W20243482292018 @default.
- W2024348229 countsByYear W20243482292019 @default.
- W2024348229 countsByYear W20243482292021 @default.
- W2024348229 crossrefType "journal-article" @default.
- W2024348229 hasAuthorship W2024348229A5013099742 @default.
- W2024348229 hasAuthorship W2024348229A5015959543 @default.
- W2024348229 hasAuthorship W2024348229A5031365945 @default.
- W2024348229 hasAuthorship W2024348229A5056459599 @default.
- W2024348229 hasAuthorship W2024348229A5065319455 @default.
- W2024348229 hasConcept C119599485 @default.
- W2024348229 hasConcept C127413603 @default.
- W2024348229 hasConcept C133731056 @default.
- W2024348229 hasConcept C141354745 @default.
- W2024348229 hasConcept C146978453 @default.
- W2024348229 hasConcept C172707124 @default.
- W2024348229 hasConcept C192562407 @default.
- W2024348229 hasConcept C41008148 @default.
- W2024348229 hasConcept C78519656 @default.
- W2024348229 hasConceptScore W2024348229C119599485 @default.
- W2024348229 hasConceptScore W2024348229C127413603 @default.
- W2024348229 hasConceptScore W2024348229C133731056 @default.
- W2024348229 hasConceptScore W2024348229C141354745 @default.
- W2024348229 hasConceptScore W2024348229C146978453 @default.
- W2024348229 hasConceptScore W2024348229C172707124 @default.
- W2024348229 hasConceptScore W2024348229C192562407 @default.
- W2024348229 hasConceptScore W2024348229C41008148 @default.
- W2024348229 hasConceptScore W2024348229C78519656 @default.
- W2024348229 hasIssue "6" @default.
- W2024348229 hasLocation W20243482291 @default.
- W2024348229 hasOpenAccess W2024348229 @default.
- W2024348229 hasPrimaryLocation W20243482291 @default.
- W2024348229 hasRelatedWork W1980703655 @default.
- W2024348229 hasRelatedWork W1993829839 @default.
- W2024348229 hasRelatedWork W1994485679 @default.
- W2024348229 hasRelatedWork W2141793720 @default.
- W2024348229 hasRelatedWork W2150998066 @default.
- W2024348229 hasRelatedWork W2796868091 @default.
- W2024348229 hasRelatedWork W2899084033 @default.
- W2024348229 hasRelatedWork W4236518619 @default.
- W2024348229 hasRelatedWork W4311413628 @default.
- W2024348229 hasRelatedWork W90510074 @default.
- W2024348229 hasVolume "9" @default.
- W2024348229 isParatext "false" @default.
- W2024348229 isRetracted "false" @default.
- W2024348229 magId "2024348229" @default.
- W2024348229 workType "article" @default.