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- W2024449669 abstract "Numerical-controlled (NC) micro-jet supersmooth polishing technology is a new non-contacting polishing method developed on the base of the float-polishing. In this paper, both the theory and the techniques about this new polishing technology are introduced in detail, and the surface of fused silica was polished, white-light interferometer (WLI) and atomic force microscope (AFM) were used to measure the evolutions of waveness and roughness during the fabricating process. No new scratches were produced when the nanoparticles removed the atoms away from the surface. The roughness decreased monotonously with the removal of subsurface damage layer. And ideal supersmooth surface without scratches was achieved with waveness less than 0.2nmrmsRMS while the high-spatial frequency roughness less than 0.1nmrmsRMS (sub-angstron)." @default.
- W2024449669 created "2016-06-24" @default.
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- W2024449669 date "2012-10-16" @default.
- W2024449669 modified "2023-09-27" @default.
- W2024449669 title "Supersmooth polishing with sub-angstron roughness" @default.
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- W2024449669 doi "https://doi.org/10.1117/12.975832" @default.
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