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- W2024480276 abstract "Although DLC coatings have good tribological properties, these are dependant on the deposition method, the property of contact surface, and test condition. Humidity, which has little influence on tribological behavior in macro scale, is an important factor of tribological behavior in small devices like MEMS. The objective of this study is to investigate the tribological behavior of DLC coatings with particular attention to their wettability at various humidities. DLC coatings were deposited on Si substrates and tested using a reciprocating friction tester against SiNballs at various humidities. The results showed that the tribological behavior of DLC coatings was dependant on relative humidity and wettablility of DLC coatings. Friction coefficient at high relative humidity was higher thar that at low relative humidity. The tungsten-containing DLC coatings had a good wear resistance at low relative humidity whereas DLC coatings derived from argon(Ar)+cesium(Cs) gases showed a good wear resistance at high relative humidity." @default.
- W2024480276 created "2016-06-24" @default.
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- W2024480276 date "2002-09-01" @default.
- W2024480276 modified "2023-09-26" @default.
- W2024480276 title "Tribological Behavior of DLC Coatings at Various Humidities" @default.
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- W2024480276 doi "https://doi.org/10.3795/ksme-a.2002.26.9.1842" @default.
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