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- W2024489113 abstract "High tunable Ba 0.5 Sr 0.5 TiO 3 thin films were deposited by r.f. magnetron sputtering on Si substrate. MgO, as a buffer layer, was deposited by r.f. magnetron sputtering. An interdigital varactor was fabricated by micro-fabrication process and the dielectric properties were investigated. The results show that the crystallisation of Ba 0.5 Sr 0.5 TiO 3 was improved by the insertion of MgO buffer layer after the post annealing process. The MgO buffer layer enhances the oriental growth of BST along (100). Also, the tunability of the Ba 0.5 Sr 0.5 TiO 3 thin films was improved and the dielectric loss greatly decreased." @default.
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- W2024489113 date "2011-01-01" @default.
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- W2024489113 title "High tunable Ba<SUB align=right>0.5Sr<SUB align=right>0.5TiO<SUB align=right>3 thin film deposited on silicon substrate with MgO buffer layer" @default.
- W2024489113 doi "https://doi.org/10.1504/ijnm.2011.043691" @default.
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