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- W2024491041 abstract "Conventional coherent illumination provides the interference at high orders necessary for microtopography. However, the resulting interferogram is not a true, undistorted contour map of the specimen, nor is there any direct method of assessing the distortion. In addition, coherent illumination gives poor resolution, and when vertical illumination is used reflections in the objective reduce the contrast. These problems are all ameliorated by using incoherent illumination limited to a small range in angle relative to the plane of the reference reflector but unconfined in azimuth, i.e., the illumination produced by an annular source in the back focal plane of the illuminating lens." @default.
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- W2024491041 date "1966-11-01" @default.
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- W2024491041 title "Interference Microtopography with Incoherent Light" @default.
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- W2024491041 doi "https://doi.org/10.1063/1.1720025" @default.
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