Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024496088> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W2024496088 endingPage "579" @default.
- W2024496088 startingPage "576" @default.
- W2024496088 abstract "Abstract Surface carbonization of Si(1 0 0) using C 2 H 2 as the carbon source was performed in a cold-wall-type chemical vapor deposition reactor at a low pressure of 5 Torr. The carbonization process as a function of C 2 H 2 partial pressure and treatment time was investigated using X-ray photoemission spectroscopy. It was found that in comparison with a complete transformation to SiC surface on Si(1 1 1) by 8 min treatment of 5×10 −2 Torr C 2 H 2 at 1343 K, the carbonization on Si(1 0 0) under the same condition forms excessive carbon, plausibly due to the larger C 2 H 2 adsorption heat on Si(1 0 0) surface. Reducing C 2 H 2 partial pressure to 1.8×10 −3 Torr and treatment time to 2 min was enough for Si(1 0 0) to form a saturated carbide layer of about 2.0 nm in thickness. Subsequent 3C–SiC(1 0 0) epitaxial film growth was found successful especially on a 10 s carbonization-treated surface that has the least amount of excessive carbon." @default.
- W2024496088 created "2016-06-24" @default.
- W2024496088 creator A5016839332 @default.
- W2024496088 creator A5041360205 @default.
- W2024496088 creator A5084688579 @default.
- W2024496088 date "2008-02-01" @default.
- W2024496088 modified "2023-09-27" @default.
- W2024496088 title "Surface carbonization of Si(100) by C2H2 and its effects on the subsequent SiC(100) epitaxial film growth" @default.
- W2024496088 cites W1978262738 @default.
- W2024496088 cites W1979567753 @default.
- W2024496088 cites W2001938693 @default.
- W2024496088 cites W2008924171 @default.
- W2024496088 cites W2017062950 @default.
- W2024496088 cites W2026383379 @default.
- W2024496088 cites W2047649702 @default.
- W2024496088 cites W2072657682 @default.
- W2024496088 cites W2078382437 @default.
- W2024496088 cites W2088773199 @default.
- W2024496088 cites W2100021126 @default.
- W2024496088 cites W2126043270 @default.
- W2024496088 cites W2136999834 @default.
- W2024496088 doi "https://doi.org/10.1016/j.jpcs.2007.07.041" @default.
- W2024496088 hasPublicationYear "2008" @default.
- W2024496088 type Work @default.
- W2024496088 sameAs 2024496088 @default.
- W2024496088 citedByCount "3" @default.
- W2024496088 countsByYear W20244960882013 @default.
- W2024496088 countsByYear W20244960882021 @default.
- W2024496088 crossrefType "journal-article" @default.
- W2024496088 hasAuthorship W2024496088A5016839332 @default.
- W2024496088 hasAuthorship W2024496088A5041360205 @default.
- W2024496088 hasAuthorship W2024496088A5084688579 @default.
- W2024496088 hasConcept C110738630 @default.
- W2024496088 hasConcept C127413603 @default.
- W2024496088 hasConcept C154877778 @default.
- W2024496088 hasConcept C159985019 @default.
- W2024496088 hasConcept C171250308 @default.
- W2024496088 hasConcept C192562407 @default.
- W2024496088 hasConcept C2524010 @default.
- W2024496088 hasConcept C26771246 @default.
- W2024496088 hasConcept C2776799497 @default.
- W2024496088 hasConcept C2779227376 @default.
- W2024496088 hasConcept C33923547 @default.
- W2024496088 hasConcept C42360764 @default.
- W2024496088 hasConcept C49040817 @default.
- W2024496088 hasConcept C61696701 @default.
- W2024496088 hasConceptScore W2024496088C110738630 @default.
- W2024496088 hasConceptScore W2024496088C127413603 @default.
- W2024496088 hasConceptScore W2024496088C154877778 @default.
- W2024496088 hasConceptScore W2024496088C159985019 @default.
- W2024496088 hasConceptScore W2024496088C171250308 @default.
- W2024496088 hasConceptScore W2024496088C192562407 @default.
- W2024496088 hasConceptScore W2024496088C2524010 @default.
- W2024496088 hasConceptScore W2024496088C26771246 @default.
- W2024496088 hasConceptScore W2024496088C2776799497 @default.
- W2024496088 hasConceptScore W2024496088C2779227376 @default.
- W2024496088 hasConceptScore W2024496088C33923547 @default.
- W2024496088 hasConceptScore W2024496088C42360764 @default.
- W2024496088 hasConceptScore W2024496088C49040817 @default.
- W2024496088 hasConceptScore W2024496088C61696701 @default.
- W2024496088 hasIssue "2-3" @default.
- W2024496088 hasLocation W20244960881 @default.
- W2024496088 hasOpenAccess W2024496088 @default.
- W2024496088 hasPrimaryLocation W20244960881 @default.
- W2024496088 hasRelatedWork W1987866901 @default.
- W2024496088 hasRelatedWork W2035678084 @default.
- W2024496088 hasRelatedWork W2080477942 @default.
- W2024496088 hasRelatedWork W2093619107 @default.
- W2024496088 hasRelatedWork W2349717563 @default.
- W2024496088 hasRelatedWork W2524724485 @default.
- W2024496088 hasRelatedWork W3047147637 @default.
- W2024496088 hasRelatedWork W3097290389 @default.
- W2024496088 hasRelatedWork W3207313470 @default.
- W2024496088 hasRelatedWork W3214782771 @default.
- W2024496088 hasVolume "69" @default.
- W2024496088 isParatext "false" @default.
- W2024496088 isRetracted "false" @default.
- W2024496088 magId "2024496088" @default.
- W2024496088 workType "article" @default.