FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024506056> ?p ?o ?g. }

• W2024506056 endingPage "1313" @default.
• W2024506056 startingPage "1305" @default.
• W2024506056 abstract "A novel method for realizing selective growth of parylene-N and parylene-C synthesized by chemical vapor deposition is presented. Exposure of surfaces to transition metals, metal salts, and organometallic complexes, such as those of iron, ruthenium, platinum, palladium, copper, and silver, is found to inhibit polymer deposition on the substrate. The maximum thickness of the selectively grown polymer films is dependent on the monomer delivery rate to the surface and metal inhibitor used, and for lower growth rates on surfaces patterned with iron, structures 1.4 μm and 4.1 μm in thickness are realized for parylene-N and parylene-C, respectively. The selectively deposited polymer films show no overgrowth onto the metallized areas of the substrate and the slope of the feature sidewalls is steeper than 1.1.μm/μm. Once polymer nucleation finally occurs on the metal films, the morphology of the deposited polymer layer reflects the effectiveness of the metal in preventing polymer deposition. For substrates with little effect on polymer deposition the film morphology consists of uniformly distributed small nodules reflecting multiple polymer nucleation sites on the surface. When the metal initially inhibits polymer growth, the morphology has significantly larger grains, indicating fewer nucleation sites. Possible mechanisms underlying the selective growth are discussed." @default.
• W2024506056 created "2016-06-24" @default.
• W2024506056 creator A5017266562 @default.
• W2024506056 creator A5071010920 @default.
• W2024506056 date "2000-04-18" @default.
• W2024506056 modified "2023-10-14" @default.
• W2024506056 title "Transition Metals for Selective Chemical Vapor Deposition of Parylene-Based Polymers" @default.
• W2024506056 cites W1968134304 @default.
• W2024506056 cites W1983614922 @default.
• W2024506056 cites W1987892612 @default.
• W2024506056 cites W2002001189 @default.
• W2024506056 cites W2009236949 @default.
• W2024506056 cites W2016981356 @default.
• W2024506056 cites W2019598711 @default.
• W2024506056 cites W2036274726 @default.
• W2024506056 cites W2037339277 @default.
• W2024506056 cites W2040633265 @default.
• W2024506056 cites W2057731465 @default.
• W2024506056 cites W2058262570 @default.
• W2024506056 cites W2058263287 @default.
• W2024506056 cites W2058865512 @default.
• W2024506056 cites W2060653985 @default.
• W2024506056 cites W2062257909 @default.
• W2024506056 cites W2069234932 @default.
• W2024506056 cites W2070895632 @default.
• W2024506056 cites W2103385358 @default.
• W2024506056 cites W2117432398 @default.
• W2024506056 cites W2130419662 @default.
• W2024506056 cites W2145568401 @default.
• W2024506056 cites W2148927531 @default.
• W2024506056 cites W2164498983 @default.
• W2024506056 cites W2171595302 @default.
• W2024506056 cites W2944276716 @default.
• W2024506056 cites W3023854223 @default.
• W2024506056 doi "https://doi.org/10.1021/cm990642p" @default.
• W2024506056 hasPublicationYear "2000" @default.
• W2024506056 type Work @default.
• W2024506056 sameAs 2024506056 @default.
• W2024506056 citedByCount "87" @default.
• W2024506056 countsByYear W20245060562012 @default.
• W2024506056 countsByYear W20245060562015 @default.
• W2024506056 countsByYear W20245060562016 @default.
• W2024506056 countsByYear W20245060562017 @default.
• W2024506056 countsByYear W20245060562018 @default.
• W2024506056 countsByYear W20245060562019 @default.
• W2024506056 countsByYear W20245060562020 @default.
• W2024506056 countsByYear W20245060562021 @default.
• W2024506056 countsByYear W20245060562022 @default.
• W2024506056 countsByYear W20245060562023 @default.
• W2024506056 crossrefType "journal-article" @default.
• W2024506056 hasAuthorship W2024506056A5017266562 @default.
• W2024506056 hasAuthorship W2024506056A5071010920 @default.
• W2024506056 hasConcept C106773901 @default.
• W2024506056 hasConcept C111368507 @default.
• W2024506056 hasConcept C127313418 @default.
• W2024506056 hasConcept C127413603 @default.
• W2024506056 hasConcept C151730666 @default.
• W2024506056 hasConcept C159985019 @default.
• W2024506056 hasConcept C161790260 @default.
• W2024506056 hasConcept C171250308 @default.
• W2024506056 hasConcept C178790620 @default.
• W2024506056 hasConcept C185592680 @default.
• W2024506056 hasConcept C188027245 @default.
• W2024506056 hasConcept C19067145 @default.
• W2024506056 hasConcept C191897082 @default.
• W2024506056 hasConcept C192562407 @default.
• W2024506056 hasConcept C2777289219 @default.
• W2024506056 hasConcept C2777385008 @default.
• W2024506056 hasConcept C2779227376 @default.
• W2024506056 hasConcept C2781155771 @default.
• W2024506056 hasConcept C2816523 @default.
• W2024506056 hasConcept C42360764 @default.
• W2024506056 hasConcept C518104683 @default.
• W2024506056 hasConcept C521977710 @default.
• W2024506056 hasConcept C544153396 @default.
• W2024506056 hasConcept C544778455 @default.
• W2024506056 hasConcept C57410435 @default.
• W2024506056 hasConcept C61048295 @default.
• W2024506056 hasConcept C64297162 @default.
• W2024506056 hasConcept C86803240 @default.
• W2024506056 hasConceptScore W2024506056C106773901 @default.
• W2024506056 hasConceptScore W2024506056C111368507 @default.
• W2024506056 hasConceptScore W2024506056C127313418 @default.
• W2024506056 hasConceptScore W2024506056C127413603 @default.
• W2024506056 hasConceptScore W2024506056C151730666 @default.
• W2024506056 hasConceptScore W2024506056C159985019 @default.
• W2024506056 hasConceptScore W2024506056C161790260 @default.
• W2024506056 hasConceptScore W2024506056C171250308 @default.
• W2024506056 hasConceptScore W2024506056C178790620 @default.
• W2024506056 hasConceptScore W2024506056C185592680 @default.
• W2024506056 hasConceptScore W2024506056C188027245 @default.
• W2024506056 hasConceptScore W2024506056C19067145 @default.
• W2024506056 hasConceptScore W2024506056C191897082 @default.
• W2024506056 hasConceptScore W2024506056C192562407 @default.
• W2024506056 hasConceptScore W2024506056C2777289219 @default.
• W2024506056 hasConceptScore W2024506056C2777385008 @default.
• W2024506056 hasConceptScore W2024506056C2779227376 @default.
• W2024506056 hasConceptScore W2024506056C2781155771 @default.

• next