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- W2024536699 abstract "Two-dimensional electrostatic potential of 45 nm technology semiconductor devices was mapped by electron holography with 2 nm resolution. The 2-D active dopant distribution was reconstructed by the inverse modeling of the electrostatic potential. Identically manufactured devices with and without a carbon co-implant were compared. The authors show that in the presence of the carbon co-implant, the two-dimensional diffusion of the boron halo implant during thermal processing is reduced. It is demonstrated that the carbon co-implant improves the control of the device short channel effects." @default.
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- W2024536699 date "2011-11-01" @default.
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- W2024536699 title "Suppression of boron diffusion in deep submicron devices" @default.
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- W2024536699 doi "https://doi.org/10.1116/1.3656376" @default.
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