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- W2024554676 abstract "Sputtered piezoelectric films are being studied for potential application to VHF through microwave frequency acoustic wave devices. This paper reports on the growth and characterization of C-axis inclined ZnO and AlN films for shear wave resonators. Orientation relationships for shear wave excitation were calculated for these films which suggest a nearly pure shear wave could be excited with films having C-axis orientation approximately 45/sup 0/ from the surface normal. At other angles, quasi-shear and quasi-longitudinal waves are excited. The well oriented ZnO or AlN films with C-axis inclined from the film normal were grown in a reactive dc planar magnetron sputtering system having an auxiliary anode structure. These films were evaluated by scanning electron microscopy (SEM) and BAW device measurements. The columnar structure of the C-axis crystallites, inclined from the Si substrate normal, was clearly visible in SEM. Films having C-axis inclination angles up to 45/sup 0/ and thicknesses up to 10 microns have been obtained. Composite resonators were fabricated by sputtering ZnO or AlN films onto the p/sup +/ Si membrane. Typically, these resonators exhibited Q s of about 5000 in 200 MHz to 500 MHz fundamental resonance range. Of particular interest is the temperature compensation of resonant frequency.more » Resonators having an absolute temperature coefficient of series resonant frequency of less than 1 ppM/C/sup 0/ around room temperature have been made for both ZnO/Si and AlN/Si composite structures. The temperature coefficient of the ZnO and AlN plate resonators was also measured to be -36.2 ppM/C/sup 0/ and -25 ppM/C/sup 0/ which suggested the temperature coefficient of the p/sup +/ Si membrane to be about +9 ppM/C/sup 0/ in the shear mode.« less" @default.
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- W2024554676 date "1983-01-01" @default.
- W2024554676 modified "2023-09-25" @default.
- W2024554676 title "Sputtered C-Axis Inclined Piezoelectric Films and Shear Wave Resonators" @default.
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- W2024554676 doi "https://doi.org/10.1109/freq.1983.200658" @default.
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