Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024565553> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2024565553 endingPage "2416" @default.
- W2024565553 startingPage "2412" @default.
- W2024565553 abstract "This paper presents an overview of electrical properties measured on advanced gate stacks consisting of a Ru electrode and Hf-based gate dielectrics. The gate stack is projected for application in the sub 45nm complementary metal-oxide-semiconductor (CMOS) technology node. Ru films were grown by metal-organic chemical vapour deposition (MOCVD) on thin HfO2, HfSiOx, HfSiON and SiO2 (control sample) dielectrics. As-deposited and forming gas annealed (90% N2+10% H2) samples were characterized by means of capacitance-voltage (C-V) and conductance-voltage (G-V) measurements. We discuss variation in dielectric constant, interfacial layer thickness, effective metal work function (@Fm,eff), oxide charge density and density of interface traps. Ru shows @Fm,eff of ~5.1eV for all Ru/Hf-based dielectrics gate stacks. We also investigated the thermal stability of the stacks upon rapid thermal annealing (RTA) in the temperature range 800-1000^oC for 10s. Samples were analyzed by Rutheford backscattering spectroscopy. The results suggest a limited thermal stability of Ru/Hf-based dielectric gate stack during source/drain activation step." @default.
- W2024565553 created "2016-06-24" @default.
- W2024565553 creator A5000487880 @default.
- W2024565553 creator A5004538088 @default.
- W2024565553 creator A5015323060 @default.
- W2024565553 creator A5020422147 @default.
- W2024565553 creator A5023922277 @default.
- W2024565553 creator A5057127285 @default.
- W2024565553 creator A5068903972 @default.
- W2024565553 creator A5073337332 @default.
- W2024565553 date "2006-11-01" @default.
- W2024565553 modified "2023-09-26" @default.
- W2024565553 title "Electrical properties and thermal stability of MOCVD grown Ru gate electrodes for advanced CMOS technology" @default.
- W2024565553 cites W1485533239 @default.
- W2024565553 cites W1963712526 @default.
- W2024565553 cites W1969180425 @default.
- W2024565553 cites W1970200102 @default.
- W2024565553 cites W1978821392 @default.
- W2024565553 cites W1981161876 @default.
- W2024565553 cites W1984216268 @default.
- W2024565553 cites W2008027055 @default.
- W2024565553 cites W2016162937 @default.
- W2024565553 cites W2024677324 @default.
- W2024565553 cites W2031703372 @default.
- W2024565553 cites W2072370149 @default.
- W2024565553 cites W2115864302 @default.
- W2024565553 cites W2149462507 @default.
- W2024565553 cites W2169493175 @default.
- W2024565553 doi "https://doi.org/10.1016/j.mee.2006.10.047" @default.
- W2024565553 hasPublicationYear "2006" @default.
- W2024565553 type Work @default.
- W2024565553 sameAs 2024565553 @default.
- W2024565553 citedByCount "6" @default.
- W2024565553 countsByYear W20245655532013 @default.
- W2024565553 countsByYear W20245655532016 @default.
- W2024565553 countsByYear W20245655532017 @default.
- W2024565553 crossrefType "journal-article" @default.
- W2024565553 hasAuthorship W2024565553A5000487880 @default.
- W2024565553 hasAuthorship W2024565553A5004538088 @default.
- W2024565553 hasAuthorship W2024565553A5015323060 @default.
- W2024565553 hasAuthorship W2024565553A5020422147 @default.
- W2024565553 hasAuthorship W2024565553A5023922277 @default.
- W2024565553 hasAuthorship W2024565553A5057127285 @default.
- W2024565553 hasAuthorship W2024565553A5068903972 @default.
- W2024565553 hasAuthorship W2024565553A5073337332 @default.
- W2024565553 hasConcept C110738630 @default.
- W2024565553 hasConcept C147789679 @default.
- W2024565553 hasConcept C171250308 @default.
- W2024565553 hasConcept C17525397 @default.
- W2024565553 hasConcept C175665537 @default.
- W2024565553 hasConcept C178790620 @default.
- W2024565553 hasConcept C185592680 @default.
- W2024565553 hasConcept C192562407 @default.
- W2024565553 hasConcept C2779227376 @default.
- W2024565553 hasConcept C46362747 @default.
- W2024565553 hasConcept C49040817 @default.
- W2024565553 hasConcept C59061564 @default.
- W2024565553 hasConceptScore W2024565553C110738630 @default.
- W2024565553 hasConceptScore W2024565553C147789679 @default.
- W2024565553 hasConceptScore W2024565553C171250308 @default.
- W2024565553 hasConceptScore W2024565553C17525397 @default.
- W2024565553 hasConceptScore W2024565553C175665537 @default.
- W2024565553 hasConceptScore W2024565553C178790620 @default.
- W2024565553 hasConceptScore W2024565553C185592680 @default.
- W2024565553 hasConceptScore W2024565553C192562407 @default.
- W2024565553 hasConceptScore W2024565553C2779227376 @default.
- W2024565553 hasConceptScore W2024565553C46362747 @default.
- W2024565553 hasConceptScore W2024565553C49040817 @default.
- W2024565553 hasConceptScore W2024565553C59061564 @default.
- W2024565553 hasIssue "11-12" @default.
- W2024565553 hasLocation W20245655531 @default.
- W2024565553 hasOpenAccess W2024565553 @default.
- W2024565553 hasPrimaryLocation W20245655531 @default.
- W2024565553 hasRelatedWork W2026270272 @default.
- W2024565553 hasRelatedWork W2058676402 @default.
- W2024565553 hasRelatedWork W2133362073 @default.
- W2024565553 hasRelatedWork W2313774757 @default.
- W2024565553 hasRelatedWork W2316871102 @default.
- W2024565553 hasRelatedWork W2319084653 @default.
- W2024565553 hasRelatedWork W2747856433 @default.
- W2024565553 hasRelatedWork W2896943785 @default.
- W2024565553 hasRelatedWork W2902546961 @default.
- W2024565553 hasRelatedWork W2902552153 @default.
- W2024565553 hasVolume "83" @default.
- W2024565553 isParatext "false" @default.
- W2024565553 isRetracted "false" @default.
- W2024565553 magId "2024565553" @default.
- W2024565553 workType "article" @default.