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• W2024573211 startingPage "248" @default.
• W2024573211 abstract "The stabilization effect of a very thin BaTiO3 (BT) buffer layer on a perovskite Pb(Mg1/3Nb2/3)O3 (PMN) thin film deposited on a Pt/Ti/SiO2/Si substrate was examined. If the film having stoichiometric PMN composition was deposited directly on the Pt/Ti/SiO2/Si substrate by pulsed laser deposition, the resultant phase was a single-phase pyrochlore-type compound and no perovskite-type PMN was detected. However, if a very thin BT buffer layer (more than 2.4 nm thick) was deposited on the Pt/Ti/SiO2/Si substrate, the formation of the pyrochlore-type compound was completely suppressed and the single-phase perovskite-type PMN film was stabilized. The dielectric constant and tanδ of PMN/BT thin films were measured as a function of the thicknesses of the PMN film and the BT buffer layer. It was clarified that tanδ was almost constant (approx. 5%) irrespective of the thicknesses of PMN and BT. The dielectric constant of the PMN/BT thin film exceeds 1000 if the thickness of PMN exceeds 200 nm; however, the dielectric constant decreases with decreasing thickness of PMN irrespective of the thickness of BT." @default.
• W2024573211 created "2016-06-24" @default.
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• W2024573211 date "2002-04-01" @default.
• W2024573211 modified "2023-09-23" @default.
• W2024573211 title "Stabilization of perovskite Pb(Mg1/3Nb2/3)O3 thin film by a thin BaTiO3 buffer layer on Pt/Ti/SiO2/Si" @default.
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• W2024573211 doi "https://doi.org/10.1016/s0040-6090(02)00130-x" @default.
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