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• W2024581021 endingPage "243" @default.
• W2024581021 startingPage "238" @default.
• W2024581021 abstract "Abstract Highly conductive SnO 2 thin films were grown by atomic layer deposition (ALD) in a wide growth temperature range (50 °C–250 °C), using a tetrakis-dimethyl-amine tin (TDMASn) precursor and an ozone reactant. The ozone SnO 2 ALD thin films showed excellent electrical properties (5.63 × 10 − 4  Ω cm) over 200 °C, but the electrical properties of the films were not measured at low growth temperature (under 125 °C). In order to verify the origin of the electrical properties as a function of growth temperature, the growth behavior and chemical bonding states, film crystallinity, surface roughness, and optical properties were examined. The ALD ozone SnO 2 thin films deposited above the 200 °C growth temperature had high carrier concentration (3.2 × 10 20 –1.2 × 10 21 ) and Hall mobility (~ 32 cm 2  V/s). Also, films deposited at 250 °C exhibited a polycrystalline structure and high transmittance (over 80% at 550 nm wavelength). As a transparent conductive oxide material, the film properties of ALD ozone SnO 2 thin films are very suitable due to their excellent high conductivity and reasonable transmittance." @default.
• W2024581021 created "2016-06-24" @default.
• W2024581021 creator A5071947816 @default.
• W2024581021 creator A5080318172 @default.
• W2024581021 date "2014-11-01" @default.
• W2024581021 modified "2023-10-03" @default.
• W2024581021 title "Highly conductive SnO2 thin films deposited by atomic layer deposition using tetrakis-dimethyl-amine-tin precursor and ozone reactant" @default.
• W2024581021 cites W1621975381 @default.
• W2024581021 cites W1969495281 @default.
• W2024581021 cites W1971492449 @default.
• W2024581021 cites W1972528599 @default.
• W2024581021 cites W1976146412 @default.
• W2024581021 cites W1987345373 @default.
• W2024581021 cites W1991509560 @default.
• W2024581021 cites W1993977078 @default.
• W2024581021 cites W2008503622 @default.
• W2024581021 cites W2010897297 @default.
• W2024581021 cites W2013158429 @default.
• W2024581021 cites W2024757191 @default.
• W2024581021 cites W2026014585 @default.
• W2024581021 cites W2031085442 @default.
• W2024581021 cites W2035449306 @default.
• W2024581021 cites W2037470666 @default.
• W2024581021 cites W2039386261 @default.
• W2024581021 cites W2042215800 @default.
• W2024581021 cites W2044804528 @default.
• W2024581021 cites W2057502280 @default.
• W2024581021 cites W2062030041 @default.
• W2024581021 cites W2073998446 @default.
• W2024581021 cites W2076531623 @default.
• W2024581021 cites W2081714664 @default.
• W2024581021 cites W2082941537 @default.
• W2024581021 cites W2086508284 @default.
• W2024581021 cites W2098964207 @default.
• W2024581021 cites W2104112302 @default.
• W2024581021 cites W2158932701 @default.
• W2024581021 cites W2159008469 @default.
• W2024581021 cites W2949565344 @default.
• W2024581021 cites W65662027 @default.
• W2024581021 doi "https://doi.org/10.1016/j.surfcoat.2014.02.012" @default.
• W2024581021 hasPublicationYear "2014" @default.
• W2024581021 type Work @default.
• W2024581021 sameAs 2024581021 @default.
• W2024581021 citedByCount "62" @default.
• W2024581021 countsByYear W20245810212015 @default.
• W2024581021 countsByYear W20245810212016 @default.
• W2024581021 countsByYear W20245810212017 @default.
• W2024581021 countsByYear W20245810212018 @default.
• W2024581021 countsByYear W20245810212019 @default.
• W2024581021 countsByYear W20245810212020 @default.
• W2024581021 countsByYear W20245810212021 @default.
• W2024581021 countsByYear W20245810212022 @default.
• W2024581021 countsByYear W20245810212023 @default.
• W2024581021 crossrefType "journal-article" @default.
• W2024581021 hasAuthorship W2024581021A5071947816 @default.
• W2024581021 hasAuthorship W2024581021A5080318172 @default.
• W2024581021 hasConcept C127413603 @default.
• W2024581021 hasConcept C131779359 @default.
• W2024581021 hasConcept C151730666 @default.
• W2024581021 hasConcept C159985019 @default.
• W2024581021 hasConcept C171250308 @default.
• W2024581021 hasConcept C178790620 @default.
• W2024581021 hasConcept C179104552 @default.
• W2024581021 hasConcept C185592680 @default.
• W2024581021 hasConcept C19067145 @default.
• W2024581021 hasConcept C191897082 @default.
• W2024581021 hasConcept C192562407 @default.
• W2024581021 hasConcept C202374169 @default.
• W2024581021 hasConcept C2779227376 @default.
• W2024581021 hasConcept C2816523 @default.
• W2024581021 hasConcept C42360764 @default.
• W2024581021 hasConcept C508106653 @default.
• W2024581021 hasConcept C525849907 @default.
• W2024581021 hasConcept C64297162 @default.
• W2024581021 hasConcept C69544855 @default.
• W2024581021 hasConcept C86803240 @default.
• W2024581021 hasConceptScore W2024581021C127413603 @default.
• W2024581021 hasConceptScore W2024581021C131779359 @default.
• W2024581021 hasConceptScore W2024581021C151730666 @default.
• W2024581021 hasConceptScore W2024581021C159985019 @default.
• W2024581021 hasConceptScore W2024581021C171250308 @default.
• W2024581021 hasConceptScore W2024581021C178790620 @default.
• W2024581021 hasConceptScore W2024581021C179104552 @default.
• W2024581021 hasConceptScore W2024581021C185592680 @default.
• W2024581021 hasConceptScore W2024581021C19067145 @default.
• W2024581021 hasConceptScore W2024581021C191897082 @default.
• W2024581021 hasConceptScore W2024581021C192562407 @default.
• W2024581021 hasConceptScore W2024581021C202374169 @default.
• W2024581021 hasConceptScore W2024581021C2779227376 @default.
• W2024581021 hasConceptScore W2024581021C2816523 @default.
• W2024581021 hasConceptScore W2024581021C42360764 @default.
• W2024581021 hasConceptScore W2024581021C508106653 @default.
• W2024581021 hasConceptScore W2024581021C525849907 @default.
• W2024581021 hasConceptScore W2024581021C64297162 @default.
• W2024581021 hasConceptScore W2024581021C69544855 @default.
• W2024581021 hasConceptScore W2024581021C86803240 @default.
• W2024581021 hasFunder F4320321142 @default.
• W2024581021 hasLocation W20245810211 @default.

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