FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024585712> ?p ?o ?g. }

• W2024585712 endingPage "3622" @default.
• W2024585712 startingPage "3616" @default.
• W2024585712 abstract "Germanium nitride (Ge3N4) films were deposited on indium phosphide (InP) compound semiconductor substrates using plasma-enhanced chemical vapor deposition. The depositions were performed in a capacitively coupled parallel-plate reactor using two different processes. In the first process, germane (GeH4), nitrogen (N2), and ammonia (NH3) reactant gases were used. In the second process, germane and pure nitrogen were used as reactant gases. The films were deposited using 13.56 MHz rf excitation to a typical thickness of 800 Å with a refractive index of 2.11–2.16. The breakdown field strength of the films was greater than 106 V/cm. Auger electron spectroscopy did not indicate significant chemical composition differences between the two deposition processes. In order to study the feasibility of plasma-deposited germanium nitride as a gate insulator, metal-insulator-semiconductor field-effect transistors (MISFETs) with 2-μm channel lengths were fabricated on InP. The device transconductance and threshold voltage for the GeH4/N2/NH3 process were 17 mS/mm and −3.6 V, respectively. The drain-source breakdown voltages were greater than 10 V. The GeH4/N2/NH3 deposition process was preferred over the GeH4/N2 process because of enhanced thickness uniformity, increased deposition rate, increased resistivity, reduced interface state density, and comparable MISFET electrical characteristics." @default.
• W2024585712 created "2016-06-24" @default.
• W2024585712 creator A5001035264 @default.
• W2024585712 creator A5050437948 @default.
• W2024585712 date "1991-03-15" @default.
• W2024585712 modified "2023-10-16" @default.
• W2024585712 title "Plasma-deposited germanium nitride gate insulators for indium phosphide metal-insulator-semiconductor field-effect transistors" @default.
• W2024585712 cites W1967919375 @default.
• W2024585712 cites W1971810642 @default.
• W2024585712 cites W1972839096 @default.
• W2024585712 cites W1979709398 @default.
• W2024585712 cites W1999297545 @default.
• W2024585712 cites W2002765787 @default.
• W2024585712 cites W2006106044 @default.
• W2024585712 cites W2012874316 @default.
• W2024585712 cites W2018551193 @default.
• W2024585712 cites W2027762875 @default.
• W2024585712 cites W2055318448 @default.
• W2024585712 cites W2055925800 @default.
• W2024585712 cites W2057738654 @default.
• W2024585712 cites W2062593837 @default.
• W2024585712 cites W2066671081 @default.
• W2024585712 cites W2077318713 @default.
• W2024585712 cites W2169335932 @default.
• W2024585712 cites W4232012965 @default.
• W2024585712 cites W4361804744 @default.
• W2024585712 doi "https://doi.org/10.1063/1.348508" @default.
• W2024585712 hasPublicationYear "1991" @default.
• W2024585712 type Work @default.
• W2024585712 sameAs 2024585712 @default.
• W2024585712 citedByCount "15" @default.
• W2024585712 countsByYear W20245857122012 @default.
• W2024585712 countsByYear W20245857122019 @default.
• W2024585712 countsByYear W20245857122021 @default.
• W2024585712 crossrefType "journal-article" @default.
• W2024585712 hasAuthorship W2024585712A5001035264 @default.
• W2024585712 hasAuthorship W2024585712A5050437948 @default.
• W2024585712 hasBestOaLocation W20245857121 @default.
• W2024585712 hasConcept C108225325 @default.
• W2024585712 hasConcept C113196181 @default.
• W2024585712 hasConcept C119321828 @default.
• W2024585712 hasConcept C119599485 @default.
• W2024585712 hasConcept C127413603 @default.
• W2024585712 hasConcept C145598152 @default.
• W2024585712 hasConcept C165801399 @default.
• W2024585712 hasConcept C171250308 @default.
• W2024585712 hasConcept C172385210 @default.
• W2024585712 hasConcept C185592680 @default.
• W2024585712 hasConcept C192562407 @default.
• W2024585712 hasConcept C194760766 @default.
• W2024585712 hasConcept C2776152967 @default.
• W2024585712 hasConcept C2776154250 @default.
• W2024585712 hasConcept C2778673556 @default.
• W2024585712 hasConcept C2779227376 @default.
• W2024585712 hasConcept C43617362 @default.
• W2024585712 hasConcept C49040817 @default.
• W2024585712 hasConcept C510052550 @default.
• W2024585712 hasConcept C544956773 @default.
• W2024585712 hasConcept C550623735 @default.
• W2024585712 hasConcept C57410435 @default.
• W2024585712 hasConceptScore W2024585712C108225325 @default.
• W2024585712 hasConceptScore W2024585712C113196181 @default.
• W2024585712 hasConceptScore W2024585712C119321828 @default.
• W2024585712 hasConceptScore W2024585712C119599485 @default.
• W2024585712 hasConceptScore W2024585712C127413603 @default.
• W2024585712 hasConceptScore W2024585712C145598152 @default.
• W2024585712 hasConceptScore W2024585712C165801399 @default.
• W2024585712 hasConceptScore W2024585712C171250308 @default.
• W2024585712 hasConceptScore W2024585712C172385210 @default.
• W2024585712 hasConceptScore W2024585712C185592680 @default.
• W2024585712 hasConceptScore W2024585712C192562407 @default.
• W2024585712 hasConceptScore W2024585712C194760766 @default.
• W2024585712 hasConceptScore W2024585712C2776152967 @default.
• W2024585712 hasConceptScore W2024585712C2776154250 @default.
• W2024585712 hasConceptScore W2024585712C2778673556 @default.
• W2024585712 hasConceptScore W2024585712C2779227376 @default.
• W2024585712 hasConceptScore W2024585712C43617362 @default.
• W2024585712 hasConceptScore W2024585712C49040817 @default.
• W2024585712 hasConceptScore W2024585712C510052550 @default.
• W2024585712 hasConceptScore W2024585712C544956773 @default.
• W2024585712 hasConceptScore W2024585712C550623735 @default.
• W2024585712 hasConceptScore W2024585712C57410435 @default.
• W2024585712 hasIssue "6" @default.
• W2024585712 hasLocation W20245857121 @default.
• W2024585712 hasOpenAccess W2024585712 @default.
• W2024585712 hasPrimaryLocation W20245857121 @default.
• W2024585712 hasRelatedWork W1616518937 @default.
• W2024585712 hasRelatedWork W2014102390 @default.
• W2024585712 hasRelatedWork W2024585712 @default.
• W2024585712 hasRelatedWork W2094890406 @default.
• W2024585712 hasRelatedWork W2098112609 @default.
• W2024585712 hasRelatedWork W2204719891 @default.
• W2024585712 hasRelatedWork W2320214029 @default.
• W2024585712 hasRelatedWork W2777199320 @default.
• W2024585712 hasRelatedWork W3012305442 @default.
• W2024585712 hasRelatedWork W2141830666 @default.
• W2024585712 hasVolume "69" @default.
• W2024585712 isParatext "false" @default.

• next