Matches in SemOpenAlex for { <https://semopenalex.org/work/W2024587301> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2024587301 abstract "A process for high-resolution patterning of the membrane- type masks used in the SCALPEL (SCattering with Angular Limitation in Projection Electron-beam Lithography) lithography system is described. SCALPEL is a 4X projection electron beam lithography tool with the potential to extend commercial lithographic capability well into the deep sub-micron range: the recently-completed SCALPEL proof- of-concept (SPOC) system has printed 0.08 micrometers lines in thick resist on Si. The details of the patterning process we currently employ and metrology results from the first series of masks are presented here. The SPOC mask blank consists of a segmented W-coated SiN (Si-rich) membrane, fabricated on a 4' Si wafer. The blank is patterned with 45 different test chips using a vector-scanned e-beam lithography tool. Metrology is performed on completed masks, and results from measurements of line-edge roughness, CD linearity, and pattern uniformity are presented. We examine the need for proximity effect correction of the pattern data, and compare the effect of correction on pattern data file size for a variety of mask technologies." @default.
- W2024587301 created "2016-06-24" @default.
- W2024587301 creator A5041500319 @default.
- W2024587301 creator A5049646262 @default.
- W2024587301 creator A5066994126 @default.
- W2024587301 creator A5077474090 @default.
- W2024587301 creator A5078230417 @default.
- W2024587301 creator A5087557413 @default.
- W2024587301 creator A5091148180 @default.
- W2024587301 date "1996-12-27" @default.
- W2024587301 modified "2023-09-23" @default.
- W2024587301 title "<title>Patterning of membrane masks for projection e-beam lithography</title>" @default.
- W2024587301 doi "https://doi.org/10.1117/12.262810" @default.
- W2024587301 hasPublicationYear "1996" @default.
- W2024587301 type Work @default.
- W2024587301 sameAs 2024587301 @default.
- W2024587301 citedByCount "1" @default.
- W2024587301 crossrefType "proceedings-article" @default.
- W2024587301 hasAuthorship W2024587301A5041500319 @default.
- W2024587301 hasAuthorship W2024587301A5049646262 @default.
- W2024587301 hasAuthorship W2024587301A5066994126 @default.
- W2024587301 hasAuthorship W2024587301A5077474090 @default.
- W2024587301 hasAuthorship W2024587301A5078230417 @default.
- W2024587301 hasAuthorship W2024587301A5087557413 @default.
- W2024587301 hasAuthorship W2024587301A5091148180 @default.
- W2024587301 hasConcept C105487726 @default.
- W2024587301 hasConcept C11413529 @default.
- W2024587301 hasConcept C120665830 @default.
- W2024587301 hasConcept C121332964 @default.
- W2024587301 hasConcept C137905882 @default.
- W2024587301 hasConcept C14737013 @default.
- W2024587301 hasConcept C154945302 @default.
- W2024587301 hasConcept C159985019 @default.
- W2024587301 hasConcept C160671074 @default.
- W2024587301 hasConcept C162307627 @default.
- W2024587301 hasConcept C162996421 @default.
- W2024587301 hasConcept C163581340 @default.
- W2024587301 hasConcept C171250308 @default.
- W2024587301 hasConcept C192562407 @default.
- W2024587301 hasConcept C195766429 @default.
- W2024587301 hasConcept C200274948 @default.
- W2024587301 hasConcept C204223013 @default.
- W2024587301 hasConcept C207789793 @default.
- W2024587301 hasConcept C2778089247 @default.
- W2024587301 hasConcept C2779227376 @default.
- W2024587301 hasConcept C41008148 @default.
- W2024587301 hasConcept C41794268 @default.
- W2024587301 hasConcept C49040817 @default.
- W2024587301 hasConcept C53524968 @default.
- W2024587301 hasConcept C57493831 @default.
- W2024587301 hasConcept C70520399 @default.
- W2024587301 hasConcept C94263209 @default.
- W2024587301 hasConceptScore W2024587301C105487726 @default.
- W2024587301 hasConceptScore W2024587301C11413529 @default.
- W2024587301 hasConceptScore W2024587301C120665830 @default.
- W2024587301 hasConceptScore W2024587301C121332964 @default.
- W2024587301 hasConceptScore W2024587301C137905882 @default.
- W2024587301 hasConceptScore W2024587301C14737013 @default.
- W2024587301 hasConceptScore W2024587301C154945302 @default.
- W2024587301 hasConceptScore W2024587301C159985019 @default.
- W2024587301 hasConceptScore W2024587301C160671074 @default.
- W2024587301 hasConceptScore W2024587301C162307627 @default.
- W2024587301 hasConceptScore W2024587301C162996421 @default.
- W2024587301 hasConceptScore W2024587301C163581340 @default.
- W2024587301 hasConceptScore W2024587301C171250308 @default.
- W2024587301 hasConceptScore W2024587301C192562407 @default.
- W2024587301 hasConceptScore W2024587301C195766429 @default.
- W2024587301 hasConceptScore W2024587301C200274948 @default.
- W2024587301 hasConceptScore W2024587301C204223013 @default.
- W2024587301 hasConceptScore W2024587301C207789793 @default.
- W2024587301 hasConceptScore W2024587301C2778089247 @default.
- W2024587301 hasConceptScore W2024587301C2779227376 @default.
- W2024587301 hasConceptScore W2024587301C41008148 @default.
- W2024587301 hasConceptScore W2024587301C41794268 @default.
- W2024587301 hasConceptScore W2024587301C49040817 @default.
- W2024587301 hasConceptScore W2024587301C53524968 @default.
- W2024587301 hasConceptScore W2024587301C57493831 @default.
- W2024587301 hasConceptScore W2024587301C70520399 @default.
- W2024587301 hasConceptScore W2024587301C94263209 @default.
- W2024587301 hasLocation W20245873011 @default.
- W2024587301 hasOpenAccess W2024587301 @default.
- W2024587301 hasPrimaryLocation W20245873011 @default.
- W2024587301 hasRelatedWork W1451772226 @default.
- W2024587301 hasRelatedWork W1520139605 @default.
- W2024587301 hasRelatedWork W1946880670 @default.
- W2024587301 hasRelatedWork W1983850620 @default.
- W2024587301 hasRelatedWork W2007100303 @default.
- W2024587301 hasRelatedWork W2024587301 @default.
- W2024587301 hasRelatedWork W2026245923 @default.
- W2024587301 hasRelatedWork W2061274105 @default.
- W2024587301 hasRelatedWork W4321635716 @default.
- W2024587301 hasRelatedWork W2526528264 @default.
- W2024587301 isParatext "false" @default.
- W2024587301 isRetracted "false" @default.
- W2024587301 magId "2024587301" @default.
- W2024587301 workType "article" @default.